Elaboration and Characterization of Amorphous Silicon Carbide Thin Films (a-SiC) by Sputerring Magnetron Technique for Photoelectrochemical CO2 Conversion

Boussaa, Sabiha Anas; Benfadel, K.; Khodja, A. Trad; Ayachi, M.; Boulil, R.; Bekhedda, K.; Talbi, L.; Boukezzata, A.; Ouadah, Y.; Allam, D. S.; Maifi, L.; Keffous, A.; Chetoui, A.; Torki, C.; Boudeffar, F.; Achacha, S.; Manseri, A.; Boutarek, N.; Kaci, S.

doi:10.1007/s12633-022-02075-x

Cited by 7 publications

(1 citation statement)

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“…Application areas for a-SiC are also expected to increase, with recent results in ultrahard materials [ 126 ], as a platform for functionalization in biosensors [ 135 ], and as a platform for photoelectrochemical CO 2 conversion [ 136 ]. Furthermore, new characterization techniques for C-based materials and amorphous materials could open up new possibilities for optimization, such as thermal-optic effects studied using two-wave mixing [ 137 ], bandgap measurements using Kelvin force microscopy [ 138 ], structural determination using atomic resolution electron tomography [ 139 ], and material simulations using molecular dynamics [ 140 , 141 ].…”

Section: Perspectivesmentioning

confidence: 99%

Amorphous SiC Thin Films Deposited by Plasma-Enhanced Chemical Vapor Deposition for Passivation in Biomedical Devices

Greenhorn,

Bano,

Stambouli

et al. 2024

Materials

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Amorphous silicon carbide (a-SiC) is a wide-bandgap semiconductor with high robustness and biocompatibility, making it a promising material for applications in biomedical device passivation. a-SiC thin film deposition has been a subject of research for several decades with a variety of approaches investigated to achieve optimal properties for multiple applications, with an emphasis on properties relevant to biomedical devices in the past decade. This review summarizes the results of many optimization studies, identifying strategies that have been used to achieve desirable film properties and discussing the proposed physical interpretations. In addition, divergent results from studies are contrasted, with attempts to reconcile the results, while areas of uncertainty are highlighted.

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