1990
DOI: 10.1364/ao.29.005115
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Efficient zone plate array accessor for optoelectronic integrated circuits: design and fabrication

Abstract: A spatially divided beam splitter is designed, by which the laser diode light couples into multiple fibers using a cylindrical lens and a phase type linear zone plate array. Using skew ray tracing, the focusing characteristics of a spatially divided beam splitter are predicted. A three-section linear zone plate array with the linewidth changing from 1.1 to 2.05 microm was fabricated by holographic mask patterning and deep UV printing. In oblique incident conditions close to the Bragg angle, the diffraction eff… Show more

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Cited by 18 publications
(10 citation statements)
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“…1 Unlike traditional lenses, a Fresnel zone plate has a at surface with a set of radially symmetric rings, which alternate between opaque and transparent. 2 As a Fresnel zone plate offers the possibility of designing high numerical aperture (NA) lens with low weight and small volume, it has been widely used in silicon based electronics with various applications, such as optical interconnects, 3 integrated optics, 4 beam focusing 5,6 and maskless lithography systems. 7 A thin lens has a thickness that is negligible compared to the focal length.…”
Section: Introductionmentioning
confidence: 99%
“…1 Unlike traditional lenses, a Fresnel zone plate has a at surface with a set of radially symmetric rings, which alternate between opaque and transparent. 2 As a Fresnel zone plate offers the possibility of designing high numerical aperture (NA) lens with low weight and small volume, it has been widely used in silicon based electronics with various applications, such as optical interconnects, 3 integrated optics, 4 beam focusing 5,6 and maskless lithography systems. 7 A thin lens has a thickness that is negligible compared to the focal length.…”
Section: Introductionmentioning
confidence: 99%
“…Fresnel lenses with their flat surfaces and small volumes are attractive for focusing, collimating and bending light in miniaturized optical systems and integrated optics [1][2][3][4][5]. Unlike curved lenses or mirrors, Fresnel lenses/zone plates use diffraction instead of refraction or reflection.…”
Section: Introductionmentioning
confidence: 99%
“…2 A Fresnel zone plate offers the possibility of designing high numerical aperture (NA) lens with low weight and small volume. It is, hence, widely used in silicon-based electronics with various applications, such as optical interconnects, 3 integrated optics, 4 beam focusing, 5,6 and maskless lithography systems. 7 In this paper we demonstrate Fresnel zone plates (FZP)-based lenses made of graphene.…”
mentioning
confidence: 99%