Efficient mask data preparation for variable shaped e-beam writing system focusing on memory devices

Jang, Tae Hwan; Lee, Jong-Bae; Shin, Jae-Pil; Yoo, Kwang-Jai; Jung, Dai-Hyun; Park, Yong‐Hee; Yoo, Moon-Hyun; Kong, Jeong-Taek

doi:10.1117/12.517828

SPIE Proceedings

2003

DOI: 10.1117/12.517828

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Efficient mask data preparation for variable shaped e-beam writing system focusing on memory devices

Tae Hwan Jang

Jong-Bae Lee

Jae-Pil Shin

et al.

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Efficient mask data preparation for variable shaped e-beam writing system focusing on memory devices

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