“…This leads to high lattice strain, more defects and misfit strain of the GZO thin films [13,18]. Therefore, several research groups have examined the growth of ZnO and GZO epitaxial thin films by introducing hetero-buffer layers, such as MgO, GaN and SiC or ZnO homo-buffer layer, to overcome these difficulties occurring in between the thin films and substrates [19][20][21][22][23][24]. Khranovskyy et al [22] have reported that the crystallinity, photoluminescence characteristics and electrical properties of epitaxial ZnO thin films grown on a Al 2 O 3 substrate at 300 1C, are improved by introducing a ZnO buffer layer compared to the properties of pure ZnO films grown on a nonbuffered substrate.…”