Effects of Wafer Precleaning and Plasma Irradiation to Wafer Surfaces on Plasma-Assisted Surface-Activated Direct Bonding

Takei, Ryohei; Yoshida, Kohei; Mizumoto, Tetsuya

doi:10.1143/jjap.49.086204

Cited by 21 publications

(16 citation statements)

References 22 publications

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“…The surface smoothness is an important factor for successful bonding. We examined the effects of pre-cleaning and surface activation processes on the roughness of the wafer surfaces [13]. A 500 nm-thick cerium-substituted yttrium iron garnet (YCe) 3 Fe 5 O 12 (Ce:YIG) single-crystalline layer was grown on a (111)-oriented substituted gadolinium gallium garnet (GdCa) 3 (GaMgZr) 5 O 12 (SGGG) substrate through a sputter epitaxial growth technique.…”

Section: Magneto-optical Materialsmentioning

confidence: 99%

“…A (100)-oriented SOI wafer, in which the silicon layer was 220 nm thick, was used for examining the effects of pre-cleaning and surface activation processes on the roughness of the wafer surfaces. The details of pre-cleaning processes are described in [13]. …”

Section: Magneto-optical Materialsmentioning

confidence: 99%

“…However, it is very difficult to grow garnet crystals on the commonly used optical waveguide platforms such as silicon. We had previously developed a surface activated direct bonding technique to integrate a magneto-optical garnet on silicon and III–V compound semiconductors [13, 14]. Using this technique, a silicon waveguide optical isolator was fabricated for the first time with an optical isolation of 21 dB at a wavelength of 1559 nm [15].…”

Section: Introductionmentioning

confidence: 99%

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Magneto-optical non-reciprocal devices in silicon photonics

Shoji

Mizumoto

2014

Science and Technology of Advanced Materials

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175

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Silicon waveguide optical non-reciprocal devices based on the magneto-optical effect are reviewed. The non-reciprocal phase shift caused by the first-order magneto-optical effect is effective in realizing optical non-reciprocal devices in silicon waveguide platforms. In a silicon-on-insulator waveguide, the low refractive index of the buried oxide layer enhances the magneto-optical phase shift, which reduces the device footprints. A surface activated direct bonding technique was developed to integrate a magneto-optical garnet crystal on the silicon waveguides. A silicon waveguide optical isolator based on the magneto-optical phase shift was demonstrated with an optical isolation of 30 dB and insertion loss of 13 dB at a wavelength of 1548 nm. Furthermore, a four port optical circulator was demonstrated with maximum isolations of 15.3 and 9.3 dB in cross and bar ports, respectively, at a wavelength of 1531 nm.

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Section: Magneto-optical Materialsmentioning

confidence: 99%

Section: Magneto-optical Materialsmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Magneto-optical non-reciprocal devices in silicon photonics

Shoji

Mizumoto

2014

Science and Technology of Advanced Materials

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175

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“…The change in surface roughness was measured by AFM as a function of plasma exposure time. The results are shown in figure 2 [7]. As is shown in this figure, the oxygen plasma exposure reduces the surface roughness in both wafers at an exposure time of 10-30 s compared with the initial state.…”

Section: Wafer Bonding Of Garnetmentioning

confidence: 73%

SOI Waveguide Optical Nonreciprocal Devices with Directly Bonded Garnet

Mizumoto

Takei

2011

MRS Proc.

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Surface activated direct bonding of a magnetooptic garnet crystal to a Silicon-On-Insulator (SOI) wafer is discussed for the application to waveguide optical nonreciprocal devices. An interferometric waveguide isolator is discussed that uses nonreciprocal phase shift brought about by a first-order magneto-optic effect. In an SOI waveguide, the low refractive index of buried oxide layer enhances the magneto-optic phase shift. This contributes to reduce the device size together with the strong field confinement of high index contrast waveguide. The interferometric isolator can be extended to an optical circulator by adopting appropriate 3-dB directional couplers to construct a Mach-Zehnder interferometer.

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“…Although Ce:YIG has many potential applications in PICs, there is one major issue in the process of their fabrication; Ce:YIG is not inherently compatible with PICs consisting of semiconductor optical components. There, an adhesive agent or plasma-assisted direct bonding [39,40] are currently employed for YIG joining, but neither of these processes is sufficient for mechanical, chemical, and thermal durability. On the key issue of how one can incorporate optical and magnetic components into one device, our proposed technique is very appealing because optical and magnetic microstructures can be directly fabricated at one time without any additional process.…”

Section: Femtosecond Laser Fabrication In Ce:yigmentioning

confidence: 99%

Three-dimensional two-photon laser fabrication for metals, polymers, and magneto-optical materials

Tanaka

Ishikawa

Amemiya

2015

Laser 3D Manufacturing II

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The three-dimensional (3D) two-photon laser fabrication techniques for metal, polymer, and magneto-optical structures are presented. Two-photon-induced reduction of metal complex ions was developed to create 3D metal micro/nano structures. Owing to the inhibition of unwanted growth of metal nano crystals using surfactant molecules, we have successfully improved the spatial resolution of fabricated metal structures down to 100 nm in linewidth. Arbitrary shaped 3D silver structures with high electric conductivity were fabricated. Two-photon-induced photopolymerization technique has been applied for the photonic wire bonding. We have demonstrated the optical interconnection of III-V based DFB lasers and photo detectors by polymer wires with optical coupling loss less than 0.3dB. We also applied two-photon laser irradiation technique for the modification of the magnetic properties of cerium-substituted yttrium iron garnet crystal (Ce x Y 3-x Fe 5 O 12 : Ce:YIG). A Ce:YIG layer was epitaxially-grown on a monomagnetic garnet (<111>-SGGG) substrate. 3D fs laser scanning in the Ce:YIG layer creates the micrometer patterns of both refractive index and magnetic properties change of the crystal. We demonstrated the micro/nanometer scale patterning of both optical and magnetic properties in the Ce:YIG crystal.

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Effects of Wafer Precleaning and Plasma Irradiation to Wafer Surfaces on Plasma-Assisted Surface-Activated Direct Bonding

Cited by 21 publications

References 22 publications

Magneto-optical non-reciprocal devices in silicon photonics

Magneto-optical non-reciprocal devices in silicon photonics

SOI Waveguide Optical Nonreciprocal Devices with Directly Bonded Garnet

Three-dimensional two-photon laser fabrication for metals, polymers, and magneto-optical materials

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