2002
DOI: 10.1016/s1359-6454(01)00328-7
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Effects of the substrate on the determination of thin film mechanical properties by nanoindentation

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Cited by 1,362 publications
(702 citation statements)
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“…at h/t $ 0.01 [26]. Therefore, it is difficult to estimate directly the elastic modulus only from indentation data in which case different models could be used to provide this information [27].…”
Section: Analysis Of the Elastic Modulusmentioning
confidence: 99%
“…at h/t $ 0.01 [26]. Therefore, it is difficult to estimate directly the elastic modulus only from indentation data in which case different models could be used to provide this information [27].…”
Section: Analysis Of the Elastic Modulusmentioning
confidence: 99%
“…This uncertainty was a motivation to make use of the residual imprint and develop a method to estimate the true contact area in the performed nanoindentation tests. In the proposed method, classified as a post mortem method, [28], the imprints were measured using AFM and then the Hommel Map commercial software was applied to work out the acquired images. The measured area was leveled using the least squares method-in the first step the reference plane was determined as a best fit to the whole measured area (the points in the imprint were excluded from the best fit procedure).…”
Section: Specification Of the Contact Area With Use Of Post-mortem Mementioning
confidence: 99%
“…To examine the residual impression in Au and Al thin films SEM and AFM were used by Zhou et al [27]. They also applied a quantitative approach to deal with the problems with estimating the real contact area, which was developed by Saha and Nix [28]. It was called 'the constant modulus assumption analysis'.…”
Section: Introductionmentioning
confidence: 99%
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“…Wong et al (1997) proposed an experimental setup to examine the elastic properties of nanostructures, the principle of which is based on a continuum beam model. Continuum mechanics models have also been adopted in the study of nanoindentation (Saha and Nix, 2002) and the mechanics of graphene (Young et al, 2012;Liu et al, 2013). Note that the applicability of the conventional continuum beam models in the mechanics of nanotubes and nanorods has been previously discussed by Harik (2001).…”
Section: Mechanics Gets Closer To Quantum Mechanicsmentioning
confidence: 99%