Effects of the process conditions on the plume of a laser-irradiated indium–tin-oxide target

Calı̀, C.; Macaluso, Roberto; Mosca, Mauro

doi:10.1016/s0030-4018(01)01459-6

Optics Communications

2001

DOI: 10.1016/s0030-4018(01)01459-6

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Effects of the process conditions on the plume of a laser-irradiated indium–tin-oxide target

C. Calı̀

Roberto Macaluso

Mauro Mosca

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Cited by 5 publications

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Effects of the process conditions on the plume of a laser-irradiated indium–tin-oxide target

Cited by 5 publications

References 16 publications

Investigation of low temperature amorphous (In Ga1−)2O3 films modulated by indium content for optimization in solar-blind photodetector

Investigation of low temperature amorphous (In Ga1−)2O3 films modulated by indium content for optimization in solar-blind photodetector

Growth of ITO thin films by magnetron sputtering: OES study, opticaland electrical properties

Effect of working pressure on Sn/In composition and optoelectronic properties of ITO films prepared by high power impulse magnetron sputtering

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