Effects of sintering additives on dispersion properties of Al2O3 slurry containing polyacrylic acid dispersant

Ohtsuka, Hideyuki; Mizutani, Hidetoshi; Iio, Satoshi; Asai, Kazuki; Kiguchi, Takayoshi; Satone, Hiroshi; Mori, Takamasa; Tsubaki, JunIchiro

doi:10.1016/j.jeurceramsoc.2010.11.001

Cited by 24 publications

(9 citation statements)

References 21 publications

(27 reference statements)

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“…Generally, a slurry whose particles are well dispersed has low apparent/relative viscosity and is assumed to form a dense sediment; however, our study demonstrates different results. Some findings reported in previous studies indicated that the apparent viscosity of the just‐prepared slurry did not completely correlate with the packing fraction of the sediment, or the particle dispersion state changed over time 24,25,32,37–39 . These authors reported that this was caused by insufficient inter‐particle repulsion forces, the interaction between the dispersant and the binder, and the degradation of the dispersant by the dispersing process.…”

Section: Discussionmentioning

confidence: 94%

Effect of medium condition change on green body density during casting and drying

Iwata

Yamada

Mori

2020

Int J Applied Ceramic Tech

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The present study examined whether the optimum slurry conditions in which the green body with the highest packing fraction was fabricated were the same regardless of whether tape or slip casting methods were used. Additionally, we investigated the optimum slurry evaluation method to predict the packing fraction of each green body. Specifically, aqueous dense alumina slurries, whose particle dispersion state was changed by varying pH and the amount of dispersant additive, were prepared. After changing the pH, the optimum slurry conditions were achieved regardless of the casting method. The most suitable amount of additive dispersant differed due to the changing solution conditions during the casting and drying process; the medium of the slurry permeated into the plaster during slip casting and dried on the substrate during tape casting. Thus, in slip casting, non‐adsorbed polymers could also be permeated. Hence, it is crucial for slurry evaluation to predict the packing fraction of the slip cast body. A sedimentation test, which involved particle condensation as well as casting, was valid for the green sheet. Conversely, it was experimentally shown that the constant pressure filtration test, which involved the permeation of the medium in addition to particle condensation, was suitable for slip casting.

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Section: Discussionmentioning

confidence: 94%

Effect of medium condition change on green body density during casting and drying

Iwata

Yamada

Mori

2020

Int J Applied Ceramic Tech

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“…In Figure 13, the correlation between the packing fraction and relative viscosity was poor, especially that the slurry with 2 mg·g -1 added PCA did not fit the trend. In previous works, Tsubaki et al [11], Mori et al [12,16] and Ohtsuka et al [26] gave some examples when the apparent viscosity of a slurry does not correspond to the result of gravitational sedimentation test, and observed the phenomenon of time-dependent viscosity change in an alumina slurry due to change in the particle dispersion state. Furthermore, Hotta et al [27] also reported that the change of particle dispersion state with time was caused by the degradation of the dispersant during the ball-milling process.…”

Section: Difference Between Hydrostatic Pressure Measurement and Viscmentioning

confidence: 99%

Determination of optimum slurry evaluation method for the prediction of BaTiO₃ green sheet density

Iwata

Mori

2020

Journal of Asian Ceramic Societies

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In this study, the particle dispersion state in a dense BaTiO 3 slurry containing a dispersant and binder was assessed by various slurry evaluations such as particle size distribution measurement by laser diffraction, viscosity measurement, dynamic viscoelasticity measurement, and hydrostatic pressure measurement, which is a novel slurry evaluation technique developed by our group. Then, the relationship between the slurry evaluation results and the packing fraction of green sheets fabricated from these slurries was discussed. We found that the particle size distribution and the relative viscosity and yield stress by dynamic viscoelasticity measurement could not properly estimate the packing fraction of green sheets. In contrast, the hydrostatic pressure measurement was able to distinguish the particle dispersion state, and the results show an acceptable correlation with the packing fraction. The reason is that our developed method evaluates not only the initial particle dispersion state, but also its change as the particle concentration increases. ARTICLE HISTORY

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“…PAA coated ceria particles are known to undergo transitions of bridging agglomeration-stable-flocculation depending on their physicochemical conditions such as pH, ionic strength, temperature, and concentration [81]. Citric acid and PAA have been used to disperse alumina abrasives [82,83]. Song et al suggested that the mixed dispersant system of citric acid and PAA was very useful for the stable dispersion of alumina abrasives, leading to higher Cu removal rates by suppressing the hydration of alumina abrasive [84].…”

Section: Adsorption Behavior and Mechanism Of Dispersants On Abrasive Particlesmentioning

confidence: 99%

A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization

Seo

2021

Journal of Materials Research

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As the minimum feature size of integrated circuit elements has shrunk below 7 nm, chemical mechanical planarization (CMP) technology has grown by leaps and bounds over the past several decades. There has been a growing interest in understanding the fundamental science and technology of CMP, which has continued to lag behind advances in technology. This review paper provides a comprehensive overview of various chemical and mechanical phenomena such as contact mechanics, lubrication models, chemical reaction that occur between slurry components and films being polished, electrochemical reactions, adsorption behavior and mechanism, temperature effects, and the complex interactions occurring at the wafer interface during polishing. It also provides important insights into new strategies and novel concepts for next‐generation CMP slurries. Finally, the challenges and future research directions related to the chemical and mechanical process and slurry chemistry are highlighted.

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Effects of sintering additives on dispersion properties of Al2O3 slurry containing polyacrylic acid dispersant

Cited by 24 publications

References 21 publications

Effect of medium condition change on green body density during casting and drying

Effect of medium condition change on green body density during casting and drying

Determination of optimum slurry evaluation method for the prediction of BaTiO₃ green sheet density

A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization

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Effects of sintering additives on dispersion properties of Al2O3 slurry containing polyacrylic acid dispersant

Cited by 24 publications

References 21 publications

Effect of medium condition change on green body density during casting and drying

Effect of medium condition change on green body density during casting and drying

Determination of optimum slurry evaluation method for the prediction of BaTiO3 green sheet density

A review on chemical and mechanical phenomena at the wafer interface during chemical mechanical planarization

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Product

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Determination of optimum slurry evaluation method for the prediction of BaTiO₃ green sheet density