Effects of Si doping in high-quality AlN grown by MOVPE on trench-patterned template

Sn-assisted heteroepitaxy improves ZnTiN2 photoabsorbers

“…20,21 Surfactants can promote 2-dimensional layer-by-layer growth, which has been shown to improve not only the surface quality, but also other material properties, of nitride thin lms. 27,28 A recent study has also demonstrated a ux-lm-coated method to grow high quality AlN thin lms using an Al-Sn ux, signifying This journal is © The Royal Society of Chemistry 2024 a benet of using low melting point elements or compounds for improving nitride thin lm growth. 29 However, the ux-lmcoated method showed no signicant concentration of Sn in the nal AlN lm which differs from the reactive sputtering method used in this work that shows Sn incorporated throughout the nitride lm.…”