Effects of Oxygen and Substrate Temperature on Properties of Amorphous Carbon Films Fabricated by Plasma-Assisted Pulsed Laser Deposition Method

Correlations between microstructure and hydrophobicity properties of pulsed laser deposited diamond-like carbon films

“…Changes in the lineshape and peak positions of the XPS C1s peaks can be observed as the substrate temperature is increased. Moreover, the C1s peak position shifts toward lower binding energies, the peak width is narrowed, and its shape becomes asymmetric, indicating the transformation of sp 3 sites into sp 2 sites with the increase of substrate temperature [40]. Fig.…”

Preparation of double layer film of boron and carbon by pulsed laser deposition

“…We introduced a mask with a 10-mm square hole between the target and substrate. In this experiment, carbon film was previously deposited on substrate by PLD in oxygen plasma ambience as reported in [5], and then boron was deposited over the carbon film in vacuum for 5 − 240 min. All the experiments were carried out at room temperature.…”

“…Fig. 1 shows the AFM image of the film surface: (a) carbon film deposited in oxygen plasma ambience [5] and (b) the film after boron was deposited for 120 min on film (a). Nanometer-size particles (nanoparticle) were seen on film (a).…”

“…The B 1s spectra of the film also contained two different components (not shown in the text), B-B bond (the peak binding energy is 188.6 eV) and B-C bond (190.6 eV) [7]. The C 1s spectra was deconvoluted into four components as similarly performed in [5];…”

The formation of diamond-like carbon film at atmospheric pressure by the pulsed laser/plasma hybrid deposition method

“…In the other approaches similar to the PLD, the pulsed plasma deposition method has been broadly used for the formation of the DLC and other materials [6,11,12]. Due to the kinetic energy of the carbon particle in the high temperature plasma flow, the DLC film could be deposited on the substrate with the plasma [13][14][15]. It is possible to increase the kinetic energy of the carbon particles with the plasma torch at elevated temperatures of the plume under the pulsed laser radiation.…”