Thin films of p-type Bi 0.52 Sb 1.48 Te 3 + 3% Te were deposited on glass substrates by flash evaporation. X-ray diffraction and field-emission scanning electron microscopy were performed to characterize the thin films, and the effects of preparation and annealing parameters on the thermoelectric properties were investigated. It was shown that the power factors of the films increased with increasing deposition temperature. Annealing the as-deposited films improved the power factors when the annealing time was less than 90 min and the annealing temperature was lower than 250°C. A maximum power factor of 10.66 μW cm −1 K −2 was obtained when the film was deposited at 200°C and annealed at 250°C for 60 min. Because of their potential applications in microelectronics and other high-technology fields, Bi 2 Te 3 -based thermoelectric materials have attracted much attention in recent years [1][2][3]. The performances of thermoelectric materials depend on the thermoelectric figure-of-merit, ZT, which is defined as ZT = S 2 Tσ/κ, where S is the Seebeck coefficient, σ is the electrical conductivity, κ is the thermal conductivity, and T is the absolute temperature. The product S 2 is defined as the thermoelectric power factor. The power factor should be maximized and the thermal conductivity should be reduced in order to achieve high-efficiency thermoelectric materials. It is apparent that improvements in the thermoelectric figure of merit are possible by increasing S and σ, and by decreasing the thermal conductivity. [18]. In this work, because of the simple configuration of the deposition system, we use a flash evaporation method [19][20][21][22] for the fabrication of Bi 2 Te 3 -based alloy thin films. Annealing can strongly influence the electrical transport behavior of semiconductor films. It has been reported that annealing has a positive effect on the thermoelectric properties of Bi 2 Te 3 -based materials [23,24]. However, the thermoelectric properties of Bi 2 Te 3 -based materials depend not only on the carrier concentration but also on the grain size and grain orientation, and these will also be altered during the annealing process. Little systematic research has been done on the effects of preparation and annealing conditions on the thermoelectric properties of Bi 2 Te 3 -based thin films. In this study, we prepare p-type Bi 0.52 Sb 1.48 Te 3 + 3% Te thin