Effects of Ion Beam Energy on the Formation of Cubic Boron Nitride Thin Films by Pulsed Nd:YAG Laser Deposition

Abstract

Cubic boron nitride (cBN) thin films are synthesized on Si(100) substrates by a pulsed neodymium: yttrium-aluminumgarnet (Nd:YAG) laser deposition method using an ion beam in order to enhance the synthesis of the cBN phase. The deposited films were characterized by a Fourier transform infrared (FT-IR) measurement method. When a pure N 2 ion beam is used, some absorption peaks for hexagonal boron nitride (hBN) are visible, but the peak for cBN cannot be observed. When argon(Ar) gas is mixed with the reactant nitrogen(N 2 ) gas, the peak at 1050 cm −1 for cBN appears, in addition to those of hBN. When the ion-beam current and voltage is increased to 20 mA and 400 V, the absorption peak intensity for cBN increases, and that of hBN disappears. These results suggest that nitrogen and argon ion bombardment plays an important role in the formation of cBN films.

Effects of Surface Coating on Cylinder Rods Prepared Using Sputtering Deposition Method with Modulated Magnetic Field

“…We have studied thin-film preparation using plasma processing techniques including the use of hard coatings, such as TiN, TiC, WC, cBN, and CN. [9][10][11][12][13][14][15][16][17] To improve the properties of superhard material surfaces on long cylinder rods, hard materials such as tungsten, carbon, and titanium were prepared on a carbide steel cylinder rod by a new magnetron sputtering deposition method using a modulated magnetic field. During the deposition, plasma was generated between the cylinder rod anode substrate and the cylinder pipe targets, and a modulated magnetic field was used to improve the axial and radial uniformities of the film and deposition rate.…”