2023
DOI: 10.1021/acs.cgd.3c00227
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Effects of Induced Current in Crystals on the Melt Flow and the Melt–Crystal Interface during Industrial 300 mm Czochralski Silicon Crystal Growth under a Transverse Magnetic Field

Abstract: Due to the high magnetic field intensity during industrial 300 mm silicon crystal growth, typically up to 0.3 T, the crystal's rotation under this transverse magnetic field (TMF) induces a current that is strong enough to impact both the melt flow and the melt/crystal interface (m/c interface) shape. This paper investigates the influence of TMF-induced current in crystals on the melt flow, temperature distribution, and interface shape through the conduction of three sets of 3D simulations that vary in the elec… Show more

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Cited by 4 publications
(1 citation statement)
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“…Conversely, it is evident that as the crystal rotation speed increases, the melt velocity beneath the crystal increases, and the clockwise flow strengthens, manifested by the expansion of its occupied area. In should be pointed out that the clockwise flow beneath the crystal hinders the attainment of a flat c-m interface [16]. Therefore, the improvement in crystal speed is not conducive to obtaining a flat c-m interface in the present study.…”
Section: Thermal Stressmentioning
confidence: 64%
“…Conversely, it is evident that as the crystal rotation speed increases, the melt velocity beneath the crystal increases, and the clockwise flow strengthens, manifested by the expansion of its occupied area. In should be pointed out that the clockwise flow beneath the crystal hinders the attainment of a flat c-m interface [16]. Therefore, the improvement in crystal speed is not conducive to obtaining a flat c-m interface in the present study.…”
Section: Thermal Stressmentioning
confidence: 64%