2001
DOI: 10.4028/www.scientific.net/msf.353-356.275
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Effects of Hydrogen Implantation and Annealing on the Vibrational Properties of 6H-SiC

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Cited by 4 publications
(5 citation statements)
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“…Their bright-field image of hundred keV Ge implanted into 6H-SiC and annealed for 20 min at 1000°C showed a spot pattern corresponding to defective 3C-SiC polytype with twins and stacking faults. There was a definite orientation relationship with the hexagonal matrix: [111] 3C-SiC is parallel to [0001] 6H-SiC, and [110] 3C-SiC is parallel to [ 0 2 11 ] of the 6H-SiC matrix [199]. They also observed voids in the recrystallized polycrystalline SiC layer.…”
Section: Annealing Of Radiation Damagementioning
confidence: 88%
“…Their bright-field image of hundred keV Ge implanted into 6H-SiC and annealed for 20 min at 1000°C showed a spot pattern corresponding to defective 3C-SiC polytype with twins and stacking faults. There was a definite orientation relationship with the hexagonal matrix: [111] 3C-SiC is parallel to [0001] 6H-SiC, and [110] 3C-SiC is parallel to [ 0 2 11 ] of the 6H-SiC matrix [199]. They also observed voids in the recrystallized polycrystalline SiC layer.…”
Section: Annealing Of Radiation Damagementioning
confidence: 88%
“…Again, the other two Raman active modes can be measured by polarization effect [8]. Similar analysis can be applied to the Raman spectra from the 6H-SiC [6] and to all semiconductors with the C 4 6v space group. We also observe two phonon processes in GaN and ZnO.…”
Section: Resultsmentioning
confidence: 98%
“…Raman spectra from hexagonal GaN, ZnO and 6H-SiC with the C 4 6v space group were collected at room temperature in standard back-scattering configuration using as exciting frequency an Ar + -ion laser operated at 514.5nm [4][5][6].…”
Section: Resultsmentioning
confidence: 99%
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“…The shift could be associated with the shallow donar -deep acceptor transition. Kunert et al [13] reported that the yellow band shifts towards the lower wavelength side upon a particle irradiation on GaN. Also the blue emission intensity is high at LT.…”
Section: Photoluminescencementioning
confidence: 96%