Effects of Electrode Size and Position on the Force-Frequency Characteristic of Integrated Resonator

Abstract

Analyzing stress distribution of the thin circular quartz wafer subjected the radial force through the ANSYS finite element simulation, as well as the theoretical simulation, this paper designed two integrated quartz resonators with different structures and carried on experiments on force-frequency characteristic of resonators. The experimental results show that the resonators force-frequency characteristic is not only closely related to adding force azimuth, but also the electrode size and position. And when force azimuths are same, integrated resonator with asymmetric structure has better force-frequency characteristic, its force-frequency conversion coefficient could achieve 551.8Hz/N after electrode was evaporated with Au.