Effects of Deposition Conditions on Carbon-Film Resistivity and Microstructure

Abstract

539.216.2Studies have been made on the dependence of carbon-film resistivity on deposition temperature (20-650°C) and magnetron discharge power (50-650 W). Electron diffraction and Raman scattering have been used to examine the film structure. The results suggest that the structure is formed mainly by carbon atoms with sp 2 bonding. In the range 20-450°C, aromatic rings are formed together with graphitic clusters, and the degree of ordering increases with the condensation temperature. At T ≥ 500°C, there is a change in the mechanism of C film growth, and graphitic-phase nuclei are formed and grow directly on the substrate. At a sufficiently high magnetron discharge power, there is uncontrolled heating of the condensation surface in the deposition of carbon films on ceramic substrates with low thermal conductivity. The growing film is affected by two competing processes: the temperature rise in the substrate favors graphitization, while the increase in the energy of the particles forming the film causes disordering. In the power range 50-400 W, the substrate temperature effect predominates, but above 400 W, the particle energy effect does.

Binary and Ternary Doping of Nitrogen, Boron, and Phosphorus into Carbon for Enhancing Electrochemical Oxygen Reduction Activity

“…This indicates that the B-doping reduces defect sites in the NDC-based carbon and reinforces the degree of sp 2 -carbon. ORR involves the transfer of electrons to an active site; therefore, the increased electron conductivity through enhancing the degree of sp 2 -carbon improves the ORR activity of the carbon-based catalysts. ,− …”

Modifications of surface and bulk properties of magnetron-sputtered carbon films employing a post-treatment of atmospheric pressure plasma

“…Carbon materials are widely studied for their wide range of applications such as protective coatings, sensing materials, medical implants, supercapacitors, electrodes, solar cells, etc. because they have the best combinations of structural, electrical, optical, and chemical properties, [1][2][3][4][5] and they are low cost, abound in nature and versatile materials. They possess a rich diversity of their structural forms such as (i) crystalline form (diamond, graphite, fullerene), (ii) amorphous carbon films, (iii) carbon nanoparticles, (iv) engineering carbons with more or less disordered microstructures based on that of graphite.…”