2000
DOI: 10.1016/s0040-6090(00)01165-2
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Effects of cross-magnetic field on thin film preparation by pulsed Nd/YAG laser deposition

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Cited by 13 publications
(4 citation statements)
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“…This study investigates plasma expansion in TMF to understand plasma dynamics [11], plume species spectrum intensity, plume refinement [28][29][30], and plasma instabilities [31]. EUV lithographic sources, debris reduction, thin film-deposition, nanoparticle synthesis, surface alterations, and LIBS detection-limits enhancement are key applications [32][33][34]. Externally applied TMF may influence plasma characteristics (optical spectrum intensity, T e and n e ) and micro/nano surface structure.…”
Section: Introductionmentioning
confidence: 99%
“…This study investigates plasma expansion in TMF to understand plasma dynamics [11], plume species spectrum intensity, plume refinement [28][29][30], and plasma instabilities [31]. EUV lithographic sources, debris reduction, thin film-deposition, nanoparticle synthesis, surface alterations, and LIBS detection-limits enhancement are key applications [32][33][34]. Externally applied TMF may influence plasma characteristics (optical spectrum intensity, T e and n e ) and micro/nano surface structure.…”
Section: Introductionmentioning
confidence: 99%
“…The LIP interaction with magnetic field can initiate various physical phenomena including, emission enhancement, restricted plasma free expansion, plasma instabilities, Joule heating effect, plasma confinement, conversion of thermal energy of plasma into kinetic energy, which are accountable for increasing the electron number density and temperature in laser-generated plasma [ 15 , 16 , 17 , 18 , 19 , 20 , 21 , 22 , 23 , 24 , 25 , 26 ]. The subject has significant utilizations in numerous extents like in extreme ultra-violet (EUV) lithographic sources, debris mitigation, thin film deposition, nanoparticle synthetization, surface modifications and LIBS detection-limits enhancement [ 27 , 28 , 29 , 30 , 31 , 32 ]. The existence of magnetic field is proposed to effectively enhance the plasma parameters including plume signal strength, plasma lifetime, electron number density and electron temperature [ 33 ].…”
Section: Introductionmentioning
confidence: 99%
“…We have studied thin-film preparation using plasma processing techniques including the use of hard coatings, such as TiN, TiC, WC, cBN, and CN. [9][10][11][12][13][14][15][16][17] To improve the properties of superhard material surfaces on long cylinder rods, hard materials such as tungsten, carbon, and titanium were prepared on a carbide steel cylinder rod by a new magnetron sputtering deposition method using a modulated magnetic field. During the deposition, plasma was generated between the cylinder rod anode substrate and the cylinder pipe targets, and a modulated magnetic field was used to improve the axial and radial uniformities of the film and deposition rate.…”
Section: Introductionmentioning
confidence: 99%
“…During the deposition, plasma was generated between the cylinder rod anode substrate and the cylinder pipe targets, and a modulated magnetic field was used to improve the axial and radial uniformities of the film and deposition rate. 9)…”
Section: Introductionmentioning
confidence: 99%