2019
DOI: 10.1109/tdei.2018.007561
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Effects of constant-voltage stress on the stability of Parylene-C columnar microfibrous thin films

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Cited by 5 publications
(5 citation statements)
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“…The leakage current in figure 4(b) is about 200 µA at V stress = 20 V and t = 11 s, while the I stress in figure 5(a) is about 266 µA at V g = 19.75 V. The value of the leakage current in figure 4(b) is higher because the MIS capacitor is under CVS. Therefore, the leakage current is expected to decay as the stress time increases until a steady-state value that equals to the leakage current in figure 5(a) [5].…”
Section: Time-dependent Dielectric-breakdown Characterization After A...mentioning
confidence: 99%
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“…The leakage current in figure 4(b) is about 200 µA at V stress = 20 V and t = 11 s, while the I stress in figure 5(a) is about 266 µA at V g = 19.75 V. The value of the leakage current in figure 4(b) is higher because the MIS capacitor is under CVS. Therefore, the leakage current is expected to decay as the stress time increases until a steady-state value that equals to the leakage current in figure 5(a) [5].…”
Section: Time-dependent Dielectric-breakdown Characterization After A...mentioning
confidence: 99%
“…Parylene C is commonly used as a dielectric material for electronic applications [1,[3][4][5][6][7][8][9]. Pinholefree films of this polymer function well as protection layers [10] to minimize device degradation caused by exposure to air and moisture.…”
Section: Introductionmentioning
confidence: 99%
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“…Parylene C is commonly used as a dielectric material for electronic applications [1,3,4,5,6,7,8,9]. Pinhole-free films of this polymer function well as protection layers [10] to minimize device degradation caused by exposure to air and moisture.…”
Section: Introductionmentioning
confidence: 99%
“…In recent years, this polymer has been used for flexible substrates due to its desirable mechanical properties (yield strength of 55.1 MPa and static Young's modulus of 2.76 GPa) and the ease of deposition in both micrometer-and nanometer-thickness regimes [11]. In addition, we have recently shown that Parylene-C columnar microfibrous thin films are viable candidates for use as interlayer dielectrics [3,4,5].…”
Section: Introductionmentioning
confidence: 99%