A ϳ150-nm-thick coating layer consisting of ␣-Al 2 O 3 as the major phase with a minute amount of -Al 2 O 3 was deposited on the surface of a single-crystal Ni-based superalloy by chemical vapor deposition (CVD). Within 0.5 hours of oxidation at 1150°C, the resulting thermally grown oxide (TGO) formed on the coated alloy surface underwent significant lateral grain growth. Consequently, within this time scale, the columnar nature of the TGO became established. After 50 hours, a network of ridges was clearly observed on the TGO surface instead of equiaxed grains typically observed on the uncoated alloy surface. Comparison of the TGO morphologies observed with and without the CVD-Al 2 O 3 layer suggested that the transient oxidation of the alloy surface was considerably reduced. Also, the CVD-Al 2 O 3 layer significantly reduced the growth rate of the TGO and improved its spallation resistance, while slowing the internal oxidation of Ta-rich areas that were present in the superalloy as-casting defects. These results demonstrated that this thin ␣-Al 2 O 3 coating could be used as a means of favorably altering the TGO morphology and growth kinetics for no bond coat thermal barrier coating (TBC) applications.