Radiation damage effects are studied in OMVPE n‐GaAs for a wide range of alpha (α) particle fluences, using an americium‐241 (Am‐241) radio‐nuclide and a linear van de Graaff accelerator as the particle sources. The samples are irradiated at 300 K, after fabricating palladium Schottky barrier diodes (SBDs) on the 1.2 × 1016 cm−3 Si doped epitaxial layers. The radiation induced defects are characterized using conventional deep level transient spectroscopy (DLTS). A correlation is made between the change in SBD characteristics and the quantity and type of defects introduced during α‐particle irradiation. It is shown that the two parameters most susceptible to this irradiation are the reverse leakage current of the SBDs and the free carrier density of the epilayer. The introduction rate and the “signatures” of the α‐particle irradiation induced defects are calculated and compared to those of similar defects introduced during electron irradiation.