Abstract:Co-resonantly coupled cantilever sensors have recently been introduced as a very promising concept to strongly increase the sensitivity of dynamic-mode cantilever MEMS sensors (several orders of magnitude experimentally demonstrated) while maintaining the ease of detection. Mechanical coupling and eigenfrequency matching of a micro- and a nanocantilever lead to a coupled system where any interaction at the highly sensitive nanocantilever alters the oscillatory state of the entire system which is detected at th… Show more
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