“…1,2 However, the improved efficiency of a combinatorial approach makes it possible to treat complex systems and interactions in a "faster, cheaper, and more convenient" way and has stimulated much progress in the past few years in studies of phase diagrams and composition-structure-property relationships. [3][4][5][6][7][8][9][10] Various parallel synthesis strategies have been developed to produce materials libraries. For instance, the combinatorial thin film deposition technique by physical deposition processes, which utilizes natural gradient profiles followed by interdiffusion, has been developed for phase diagrams of alloys.…”