1998 IEEE International Reliability Physics Symposium Proceedings 36th Annual (Cat No 98CH36173) RELPHY-98 1998
DOI: 10.1109/relphy.1998.670668
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Effect of VLSI interconnect layout on electromigration performance

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Cited by 25 publications
(12 citation statements)
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“…We see that the difference in stress build-up is already apparent in the beginning of electromigration process for these cases. The experimental data that already reported in [2,3,5] have the same conclusion as this work. In literature [3,5], they clearly showed the lifetime prolongation due to the increase the length of reservoirs (or reservoir area).…”
Section: The Reservoir Area Effectsupporting
confidence: 90%
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“…We see that the difference in stress build-up is already apparent in the beginning of electromigration process for these cases. The experimental data that already reported in [2,3,5] have the same conclusion as this work. In literature [3,5], they clearly showed the lifetime prolongation due to the increase the length of reservoirs (or reservoir area).…”
Section: The Reservoir Area Effectsupporting
confidence: 90%
“…As mentioned above, when the reservoir area is increased, the lifetime is prolonged. Experimental data from literature [2,4] show comparable results. However, the question needs to be answered whether the lifetime is increased due to the increase the reservoir area or the increase the number of contacts.…”
mentioning
confidence: 52%
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“…For both AlCu and damascene Cu lines resistance to electromigration starts to increase significantly for lines shorter than 100 µm, and Blech's model suggests that lines shorter than about 50 µm are essentially immune to long term electromigration failure [134][135][136].…”
Section: Electromigrationmentioning
confidence: 99%