2019
DOI: 10.1186/s11671-019-3119-3
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Effect of Ultraviolet-Ozone Treatment on MoS2 Monolayers: Comparison of Chemical-Vapor-Deposited Polycrystalline Thin Films and Mechanically Exfoliated Single Crystal Flakes

Abstract: We report the different oxidation behavior between polycrystalline chemical-vapor-deposited and mechanically exfoliated single crystal MoS 2 monolayers by ultraviolet-ozone treatment. As ultraviolet-ozone treatment time increased from 0 to 5 min, photoluminescence emission and Raman modes of both MoS 2 disappeared, suggesting structural degradation by oxidation. Analysis with optical absorbance and X-ray photoelectron spectroscopy suggested the formation of MoO … Show more

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Cited by 31 publications
(26 citation statements)
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“…The low I PL near the periphery overlaps with the AFM-observed line defects present in the O 2 -treated MoS 2 . These results suggest that, unlike for samples treated using harsh oxidations [ 18 , 20 , 22 ], physisorbed O 2 at the center of the crystal actually results in an enhancement of I PL , which is in accordance with the previous report [ 17 ]. In contrast, chemically oxygenated species evidenced by line defects form near the periphery and result in the reduced I PL .…”
Section: Resultssupporting
confidence: 92%
See 1 more Smart Citation
“…The low I PL near the periphery overlaps with the AFM-observed line defects present in the O 2 -treated MoS 2 . These results suggest that, unlike for samples treated using harsh oxidations [ 18 , 20 , 22 ], physisorbed O 2 at the center of the crystal actually results in an enhancement of I PL , which is in accordance with the previous report [ 17 ]. In contrast, chemically oxygenated species evidenced by line defects form near the periphery and result in the reduced I PL .…”
Section: Resultssupporting
confidence: 92%
“…The effects of environmentally abundant oxygen and water on the optoelectronic properties of MoS 2 have been studied [ 17 , 18 , 19 ], but how these species affect the doping and ε properties of MoS 2 under ambient conditions remains largely unknown, and this is an important issue. Treatments under harsh oxidative conditions such as with oxygen plasma [ 18 ], UV-ozone [ 20 ], and high-temperature annealing (>300 °C) [ 18 , 21 , 22 ] are known to induce oxidation of the basal plane of MoS 2 . Following these treatments, the basal plane of MoS 2 exhibits reduced photoluminescence (PL), while edges and cracked regions display increased PL, suggesting that oxidation plays different roles in governing the properties of the basal plane and periphery.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, the transport, electronic, and optoelectronic properties of 2D MoS 2 have been modified by various surface functionalization techniques, including thermal, oxygen-plasma, and UV–ozone oxidation. Some of these functionalization techniques can lead to the complete/partial conversion of the topmost 2D MoS 2 layer(s) into 2D surface oxides, yielding stoichiometric MoO 3 after careful process optimization. There have been few reports of such atomic layer conversion of 2D MoS 2 into 2D MoO 3 with a very limited characterization of the oxide. ,,,, As such, a detailed and comprehensive study of the 2D monolayer MoO 3 has yet to be conducted. Moreover, no report of large-area single-layer MoO 3 has been reported to the best of our knowledge.…”
Section: Introductionmentioning
confidence: 99%
“…There have been few reports of such atomic layer conversion of 2D MoS 2 into 2D MoO 3 with a very limited characterization of the oxide. 39,42,43,47,48 As such, a detailed and comprehensive study of the 2D monolayer MoO 3 has yet to be conducted. Moreover, no report of large-area single-layer MoO 3 has been reported to the best of our knowledge.…”
Section: Introductionmentioning
confidence: 99%
“…Raman spectrometry was employed to examine the properties of MoS 2 after 30 min incubation in DI water [ 23 ]. As illustrated in Figure S1 , the absolute intensity of the two signature peaks of MoS 2 remained unaffected after the incubation, indicating there was no oxidation taking place.…”
Section: Resultsmentioning
confidence: 99%