Effect of thermally grown Al2O3 on electrical insulation properties of thin film sensors for high temperature environments

Liu, Hao; Mao, Xiling; Jiang, Shuwen

doi:10.1016/j.sna.2021.113033

Cited by 7 publications

(1 citation statement)

References 26 publications

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“…The Al 2 O 3 coatings have been widely used as electrical insulating layers for high temperature thinfilm sensors at temperatures above 600 °C [65] and show satisfactory performance (0.5-200 KΩ) at temperatures up to 800 °C. [66][67][68][69] The structure of the electrical insulation layer is shown in Figure 8a. A coating with a root-soil interlocking high-adhesion structure and a vein-membrane large-straintolerance structure was used as the transition layer.…”

Section: Application Of Vein-membrane Al 2 Omentioning

confidence: 99%

Bioinspired High Tolerant Vein–Membrane Al₂O₃ Coating

Lin

Pan

et al. 2023

Adv Funct Materials

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The vein–membrane structure inspired by insect wings is applied to the artificial structural design of materials, with the aim of enhancing the intrinsic low strain tolerance and bonding strength of Al2O3 coating. Al2O3 platelets with high aspect ratio are used as veins, forming a bioinspired vein–membrane structure along with the Al2O3 membrane. Further, Al2O3 platelets take “root” in the substrate, forming a bioinspired root–soil interlocking structure. The greatest highlight of this coating is that it can restrict the cracks to the submicron area enclosed by the vein. The multi‐bioinspired structure enabled the Al2O3 coating to sustain strains as high as 8%, which is 2 orders of magnitude higher than the reported failure strain of Al2O3 film. The bonding strength is also increased by at least five times. The vein–membrane structure opens a novel technological space for the artificial structural design of materials.

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Section: Application Of Vein-membrane Al 2 Omentioning

confidence: 99%