2014
DOI: 10.1016/j.tsf.2014.10.045
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Effect of thermal annealing on the performance of WO 3 –Ag–WO 3 transparent conductive film

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Cited by 26 publications
(9 citation statements)
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“…We note that such a performance can be comparable to the ITO with moderate quality . In addition, we also find that the TC performance of the sputtered film does not show considerable improvement by post-thermal annealing treatment, as in the case of the thermally evaporated one . This may be attributed to the presence of an essential substrate heating effect during sputtering deposition.…”
Section: Resultsmentioning
confidence: 56%
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“…We note that such a performance can be comparable to the ITO with moderate quality . In addition, we also find that the TC performance of the sputtered film does not show considerable improvement by post-thermal annealing treatment, as in the case of the thermally evaporated one . This may be attributed to the presence of an essential substrate heating effect during sputtering deposition.…”
Section: Resultsmentioning
confidence: 56%
“…The distance between the substrate and the target was kept at 7 cm. For comparison, the thermally evaporated WAW film was prepared according to our previous report . Briefly, the WAW films were deposited under the vacuum pressure of 4 × 10 –4 Pa.…”
Section: Experimental Sectionmentioning
confidence: 99%
“…Lin et al [10], investigating the optical and electrical properties of WO 3 /Ag/WO 3 multilayer films prepared by thermal evaporation, showed that the sheet resistance was gradually improved when the annealing temperatures increased to 400 C. On the one hand, the optical transmittance increased upon annealing below 200 C, above which the transmittance was degraded. The maximum FOM was estimated to be 11 Â 10 À3 U À1 when the sample was annealed at 100 C. Miao et al [11] investigated the electrical and optical properties of Al-doped ZnO (AZO)/Ag/AZO trilayer films prepared by radio frequency (RF) magnetron sputtering as functions of Ag and AZO layers thicknesses.…”
Section: Introductionmentioning
confidence: 99%
“…The electron mobility is of paramountimportance in that it determines the transverse extension of the current [14,15]. However, their electron mobilities are 32 cm 2 /(v s) and 69 cm 2 /(v s), which are too small to limit the lateral diffusion of the current [16,17,18]. In recent years, there have been many studies of graphene as a transparent conductive layer, but it has been found that the sheet resistance of single- layer graphene is particularly high, and the transparency of multilayer graphene has been reduced [19,20,21].…”
Section: Introductionmentioning
confidence: 99%