Effect of the tip-sample contact force on the nanostructure size fabricated by local oxidation nanolithography

Hu, Kexiang; Wu, Sen; Huang, Minhua; Hu, Xiaodong; Wang, Qingkang

doi:10.1016/j.ultramic.2012.01.009

Cited by 4 publications

(4 citation statements)

References 22 publications

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“…Nanotechnology, genetic engineering and intelligent technology are known as the “the most important three techniques of the 21st century”, among which, the rapid development of nanotechnology has brought us to the nano age [1,2,3,4]. Micro/nano manufacturing technology has been widely used in the environment, energy, biology, medicine, national defense and other fields, playing an increasingly important role in promoting national development and social progress [5,6,7,8,9,10,11].…”

Section: Introductionmentioning

confidence: 99%

Scratch on Polymer Materials Using AFM Tip-Based Approach: A Review

et al. 2019

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As a brand new nanomachining method, the tip-based nanomachining/nanoscratching (TBN) method has exhibited a powerful ability at machining on polymer materials and various structures have been achieved using this approach, ranging from the nanodot, nanogroove/channel, bundle to 2D/3D (three-dimensional) nanostructures. The TBN method is widely used due to its high precision, ease of use and low environmental requirements. First, the theoretical models of machining on polymer materials with a given tip using the TBN method are presented. Second, advances of nanostructures achieved by this method are given, including nanodots/nanodot arrays, a nanogroove/channel, 2D/3D nanostructures and bundles. In particular, a useful approach called the ultrasonic vibration-assisted method introduced to integrate with TBN method to reduce the wear of the tip is also reviewed, respectively. Third, the typical applications of the TBN method and the nanostructures achieved by it are summarized in detail. Finally, the existing shortcomings and future prospects of the TBN method are given. It is confirmed that this review will be helpful in learning about this method and push the technology toward industrialization.

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Section: Introductionmentioning

confidence: 99%

Scratch on Polymer Materials Using AFM Tip-Based Approach: A Review

et al. 2019

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“…In the above field-enhanced oxidation, i.e., cathodic oxidation, samples were biased negatively with respect to tips. Sugimura and coworkers [6][7][8] first reported tip-induced anodization technique on Ti films and Si by STM operating in air, in which samples were biased positively compared with tips. They fabricated patterns with resolution better than 30nm by optimizing the conditions.…”

Section: Introductionmentioning

confidence: 99%

Effect of Humidity and Bias on the Size of Nanostructures Fabricated by STM Anodization and its Application to Patterns

Yin

2016

KEM

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In this paper, the effect of humidity and sample bias on the size of nanostructures fabricated by STM anodization on a 3 nm-thick Ti film was investigated by random nano-arrays. 3.5 V and 4 V bias were applied to samples at a relative humidity of ~30% while 3.5 V, 4 V and 4.5 V were applied to samples at a relative humidity of ~43%. According to the cross section analyses, dots scattered randomly on surfaces became larger and higher as the bias increased at a constant relative humidity or as the relative humidity increased at the same bias. Two complicated patterns were fabricated by running a program in which the movement of STM tip and the sample bias were defined.

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“…(a) 两种不同类型的针尖-样品相互作用下AFM针尖位置的示意图; (b) 悬臂相对于样品z位置的典型偏转曲线; (c, d) 施加到硅表面的直流电压为12 V时, 接触模式(c)和轻敲模式(d)中纵横比与作用力之间的关系[42,44] (网络版彩图) (a) Sketch of the AFM tip position for two different kinds of tip-sample interaction. (b) Typical deflection curve of a cantilever vs. z position of the sample.…”

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“…(b) Typical deflection curve of a cantilever vs. z position of the sample. Relationship between aspect ratio and force in contact mode (c) and tapping mode (d) when a DC voltage of 12 V is applied to the silicon surface[42,44] (color online).距离减小, 使得电场强度明显增加. 此外, 振幅的减小也使得阳极氧化时间和针尖-样品平均接触力增加.…”

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confidence: 99%