Effect of the Ti-target arc current on the properties of Ti-doped ZnO thin films prepared by dual-target cathodic arc plasma deposition

Hsu, Shuo-Fu; Weng, Min‐Hang; Chou, Jyh–Horng; Fang, Chun‐Hsiung; Yang, Ru‐Yuan

doi:10.1016/j.ceramint.2016.06.043

Cited by 7 publications

(2 citation statements)

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“…Titanium doping has many effects on the properties of zinc oxide. One of them is that the extra free electrons from Ti reduce the electrical resistance and increase the conductivity (Hsu et al, 2016). The fact that Ti provides two extra free electrons also ensures that doping at a lower concentration is sufficient to achieve a high degree of conductivity, which is costly (Hsu et al, 2016).…”

Section: Introductionmentioning

confidence: 99%

“…One of them is that the extra free electrons from Ti reduce the electrical resistance and increase the conductivity (Hsu et al, 2016). The fact that Ti provides two extra free electrons also ensures that doping at a lower concentration is sufficient to achieve a high degree of conductivity, which is costly (Hsu et al, 2016). Another plus of this situation is that due to the improvement of the electrical properties, the response of the structure also increases, and the decrease in the resistance causes more sensor response in general (Shewale & Yu, 2016).…”

Section: Introductionmentioning

confidence: 99%

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Effect of Annealing and Doping Process of the Zn1-xTixO Films

ÇORLU,

TEKİN,

KARADUMAN ER

et al. 2023

Gazi University Journal of Science Part A: Engineering and Innovation

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In this study, undoped and Ti-doped ZnO thin films grown by SILAR (Successive Ionic Layer Adsorption and Reaction) method were investigated using XRD, SEM, linear absorbance and electrical characterization. The effect of doping ratio was determined changing Ti ratios from 0.05 to 0.20. In addition, the films with the same additive ratio were annealed at 300°C for 15 minutes in nitrogen environment. Thus, the effects of both annealing and doping ratio on the thin films produced were examined in detail. When the current-voltage graphs are examined, it is observed that there is a decrease in the resistance values with doping. The best additive effect was observed for Zn0.90Ti0.10O film and the structures formed after this additive ratio returned to their initial morphology.

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Section: Introductionmentioning

confidence: 99%