2015
DOI: 10.1088/1674-1056/24/2/026802
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Effect of the thickness of InGaN interlayer on a -plane GaN epilayer

Abstract: In this paper, we use the a-plane InGaN interlayer to improve the property of a-plane GaN. Based on the a-InGaN interlayer, a template exhibits that a regular, porous structure, which acts as a compliant effect, can be obtained to release the strain caused by the lattice and thermal mismatch between a-GaN and r-sapphire. We find that the thickness of InGaN has a great influence on the growth of a-GaN. The surface morphology and crystalline quality both are first improved and then deteriorated with increasing t… Show more

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Cited by 3 publications
(4 citation statements)
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“…The growth was initiated by 1-μm-thick underlying GaN template layer, which use a 40-nm-thick In x Ga 1− x N interlayer to improve the crystallinity, as discussed in detail elsewhere 68 . Subsequently, In x Ga 1−x N alloys with different Indium content x were grown at 50 torr by changing the deposition temperature and growth time with Trimethylgallium (TMGa), Trimethylindium (TMIn) and ammonia (NH 3 ) as sources and nitrogen as carrier gas.…”
Section: Methodsmentioning
confidence: 99%
See 1 more Smart Citation
“…The growth was initiated by 1-μm-thick underlying GaN template layer, which use a 40-nm-thick In x Ga 1− x N interlayer to improve the crystallinity, as discussed in detail elsewhere 68 . Subsequently, In x Ga 1−x N alloys with different Indium content x were grown at 50 torr by changing the deposition temperature and growth time with Trimethylgallium (TMGa), Trimethylindium (TMIn) and ammonia (NH 3 ) as sources and nitrogen as carrier gas.…”
Section: Methodsmentioning
confidence: 99%
“…Non-polar (11 0) In x Ga 1− x N/GaN epitaxial layers with different indium compositions x were grown on (1 02) sapphire substrates, using a single 2-inch wafer home-made low-pressure metalorganic chemical vapor deposition (MOCVD) system. The growth was initiated by 1-μm-thick underlying GaN template layer, which use a 40-nm-thick In x Ga 1− x N interlayer to improve the crystallinity, as discussed in detail elsewhere 6 8 . Subsequently, In x Ga 1−x N alloys with different Indium content x were grown at 50 torr by changing the deposition temperature and growth time with Trimethylgallium (TMGa), Trimethylindium (TMIn) and ammonia (NH 3 ) as sources and nitrogen as carrier gas.…”
Section: Methodsmentioning
confidence: 99%
“…Wang J X et al have used the α-plane InGaN interlayer to improve the property of α-plane GaN grown on sapphire substrates. [11] Liu et al have prepared GaN/InGaN multiple quantum wells on Si substrates and investigated the influences of stress on the properties. [12] Nishikawa et al have studied the current-voltage characteristics of InGaN/GaN vertical conducting diodes grown on SiC substrates.…”
Section: Introductionmentioning
confidence: 99%
“…Thus the growth of V-pits is considered a practical method to obtain LEDs with a lower operating voltage and a higher emission efficiency. In the active region of green LEDs, to release the stress from high indium composition, several periods of InGaN/GaN superlattices and blue quantum wells are usually inserted between n-GaN and green MQWs [1,[9][10][11]. These inserted layers grown under low temperature induce large V-pits at the threading dislocations [12].…”
Section: Introductionmentioning
confidence: 99%