2012
DOI: 10.1155/2012/594971
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Effect of the Substrate Movement on the Optical Properties of ZnO Thin Films Deposited by Ultrasonic Spray Pyrolysis

Abstract: Using a modified ultrasonic spray pyrolysis (USP) system, ZnO thin films were deposited on the substrate moved back and forth (ZO1) and rotated (ZO3) as well as fixed (ZO2) in the conventional USP technique. Prepared thin films are pure ZnO with a preferred crystalline orientation of (0 0 2) in the hexagonal wurtzite structure. Diffraction angle shift implies a decrease lattice parameter alongc-axis anda-axis 0.2% and 0.3%, respectively. Maximum strain has been found for ZO1 which is about (−) 0.17%. These str… Show more

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Cited by 13 publications
(10 citation statements)
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“…Nozzle (100 kHz oscillator frequency) used in this study was in a downward vertical configuration. A more detailed description of the USP system were reported in previous papers [7]. X-ray diffraction (XRD) patterns were collected with a D-Max X-ray diffractometer (Rigaku International Corp. Japan) with CuKα1 (λ=1.5405Ǻ) to obtain the structural information of the films.…”
Section: Methodsmentioning
confidence: 99%
“…Nozzle (100 kHz oscillator frequency) used in this study was in a downward vertical configuration. A more detailed description of the USP system were reported in previous papers [7]. X-ray diffraction (XRD) patterns were collected with a D-Max X-ray diffractometer (Rigaku International Corp. Japan) with CuKα1 (λ=1.5405Ǻ) to obtain the structural information of the films.…”
Section: Methodsmentioning
confidence: 99%
“…ZnO films have been prepared by various methods, such as pulsed laser deposition (PLD) [5], metal organic chemical vapor deposition (MOCVD) [6], physical vapor deposition [7], spray pyrolysis [8], and sol-gel technique [9]. Compared with others, sol-gel technique is simple, of low cost, and an advantage of large area deposition.…”
Section: Introductionmentioning
confidence: 99%
“…In the sol-gel process, the precursor solution can be coated on the substrate by dip coating, spray pyrolysis, and spin coating techniques. In recent years, ZnO, prepared by various deposition methods such as reactive evaporation [3], RF sputtering [4], chemical vapor deposition [5], ultrasonic spray pyrolysis [6][7][8], sol-gel method [9], and dip coating method [10], have found very different application areas for optoelectronics and sensor technology applications. In addition to changes of the optical constants, the change in the band gap may be advantageous in the technological use of the films.…”
Section: Introductionmentioning
confidence: 99%