Effect of the Soft X-rays on Highly Hydrogenated Diamond-Like Carbon Films

Kanda, Kazuhiro; Yokota, Kumiko; Tagawa, Masatoshi; Tode, Mayumi; Teraoka, Yuden; Matsui, Shinji

doi:10.7567/jjap.50.055801

Cited by 8 publications

(2 citation statements)

References 12 publications

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“…23) However, we have observed that the irradiation of soft X-rays on some DLC films induces the etching and=or modification of the films. [24][25][26] In our previous study, we found that the surface properties of F-DLC films were affected by the irradiation of soft X-rays. 27) Upon irradiation of synchrotron radiation (SR), the sudden desorption of fluorocarbon species from the F-DLC film surface, increases in surface wettability, film density, and the ratio of sp 2 hybridized carbon atoms, and decreases in the thickness and fluorine content of the films were observed.…”

Section: Introductionmentioning

confidence: 96%

Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays

Kanda¹,

Takamatsu²,

Miura-Fujiwara³

et al. 2018

Jpn. J. Appl. Phys.

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The effects of soft X-ray irradiation on fluorinated diamond-like carbon (F-DLC) films were investigated using synchrotron radiation (SR). The Vickers hardness of the F-DLC films substantially increased from an initial value of about 290 to about 800 HV at a dose of 50 mA·h and the remained constant at about 1100 HV at doses of more than 300 mA·h. This dose dependence was consistent with those of the film thickness and elemental composition. The depth profile of the elemental composition inside each F-DLC film obtained by the measurement of the X-ray photoelectron spectrum (XPS) during sputtering showed that the composition ratio of fluorine was approximately constant from the surface to the neighborhood of the substrate. Namely, fluorine atoms were desorbed by SR irradiation from not only the surface but also the substrate neighborhood. Modification by SR irradiation was found to occur in the entire F-DLC film of about 200 nm thickness.

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Section: Introductionmentioning

confidence: 96%

Erosion of fluorinated diamond-like carbon films by exposure to soft X-rays

Kanda¹,

Takamatsu²,

Miura-Fujiwara³

et al. 2018

Jpn. J. Appl. Phys.

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“…DLC film generally has a very strong tolerance for soft X-ray irradiation. (9) However, our group has recently reported that exposure of H-DLC film to soft X-rays leads to surface modifications; Irradiation of highly hydrogenated DLC film by soft X-rays decreases the film volume and hydrogen content (10) and increases hardness. (11) The film volume and hardness change dramatically over a synchrotron radiation (SR) dose range of 0-200 mA•h and change gradually at SR doses of greater than 200 mA•h.…”

Section: Introductionmentioning

confidence: 99%

Modification Processes for Highly Hydrogenated Diamond-Like Carbon Thin Films by Soft X-ray Irradiation

2017

Sensors and Materials

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We investigated a modification process for highly hydrogenated diamond-like carbon (H-DLC) film using exposure to synchrotron radiation (SR) in the soft X-ray region by measuring the dependence of various film properties and structural properties on the SR dose. Noticeable changes in the film volume and optical constants were observed, and the local structures of the H-DLC film changed due to SR exposure. These changes are ascribable to the desorption of hydrogen from the film, which is much faster than when the film is etched.

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