1988
DOI: 10.1063/1.100463
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Effect of the post-deposition processing ambient on the preparation of superconducting YBa2Cu3O7−x coevaporated thin films using a BaF2 source

Abstract: We have investigated the effect of the post-deposition processing ambient on the preparation of YBa2Cu3O7−x thin films from a BaF2 source. The role of H2O vapor during the high-temperature anneal is understood through a thermodynamic analysis of the fluorine removal reaction. The role of a HF getter (e.g., SiO2) is understood through the same type of analysis. We have demonstrated that a zero resistance transition temperature at 77 K can be obtained for an annealing temperature as low as 690 °C for films depos… Show more

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Cited by 70 publications
(11 citation statements)
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“…E X SITU processes for the production of (RBCO; R is a rare earth of Y) epitaxial films from deposited fluoride precursors involve a high-temperature anneal, conditioned to bring about a controlled decomposition reaction of constituent fluorides in the presence of supplied water vapor [1]. Fluorides may be in the form of , Ba(F, ), or (Ba,R)(F,O), depending on the deposition method at hand, i.e.…”
Section: Introductionmentioning
confidence: 99%
“…E X SITU processes for the production of (RBCO; R is a rare earth of Y) epitaxial films from deposited fluoride precursors involve a high-temperature anneal, conditioned to bring about a controlled decomposition reaction of constituent fluorides in the presence of supplied water vapor [1]. Fluorides may be in the form of , Ba(F, ), or (Ba,R)(F,O), depending on the deposition method at hand, i.e.…”
Section: Introductionmentioning
confidence: 99%
“…The thermodynamic data used to calculate the Gibbs free energy of the reactions can be found in the NIST-JANAF table [8]. The partial pressure of water is 4.2% usually, the partial pressure of HF varied with the change of temperature and the partial pressure of water, assumed that the partial pressure of P HF /P H2O are 1 and 1×10 -8 [9] respectively, so the ratio of P 2 HF /P H2O are 4.2×10 -2 and 4.2×10 -18 . The ∆G of reaction (2) and (3) were very close and the values were always above zero at the same partial pressure of HF when P HF /P H2O were 1 as shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…This is clear from our results presented above and the results of several other groups. [1][2][3][4][5][6][7][27][28][29] McIntyre et al have reported on the J c dependence of film thickness for similar post annealed films. 27 They showed that there is a correlation between the density of 1-2-4 stacking faults and J c in that the 1-2-4 stacking faults act as planar core type flux pinning centers thereby increasing J c .…”
Section: Discussionmentioning
confidence: 99%
“…The BaF 2 coevaporation technique has proven superior in combination with optimized ex situ post annealing at low oxygen partial pressures. [1][2][3][4][5][6][7] In general, films processed under these conditions have a good surface morphology with no large surface outgrowths, high transition temperatures (T c ), high values of the critical current density (J c ) and good microwave properties. [3][4][5][6][7] These good properties can be obtained only if the YBCO thin films are grown on special substrates.…”
Section: Introductionmentioning
confidence: 99%