Abstract:Carbon Nanotube Field Effect Transistor (CNTFET)-based technologies become more and more a concurrent alternative to Metal Oxide Semiconductor Field Effect Transistors (MOSFET) technologies. In contrast to a MOSFET technology, the active layer of a CNTFET technology is not a regular silicon film with homogeneous doping and rectangular dimensions, but an array of mostly aligned carbon nanotubes (CNTs). The quality of this active layer, which depends on various technology process parameters, is expressed by para… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.