“…The high quality GaAs films grown on Ge substrates are crucial important for the performances of these devices. Even though the mismatches of lattice constants and thermal expansion coefficients between GaAs and Ge are negligible, challenges remain in growing GaAs directly on Ge substrate [2], mainly due to the formation of anti-phase domains (APDs) when polar materials GaAs grown on nonpolar materials Ge [5,6], and the atomic interdiffusion near the GaAs/Ge interface [1,[7][8][9]. For the former, it has been well established that under proper growth conditions, the APDs can be eliminated by the adoption of off-cut Ge substrates [10][11][12][13][14][15].…”