2011
DOI: 10.1016/j.jcrysgro.2010.10.101
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Effect of temperature on the mutual diffusion of Ge/GaAs and GaAs/Ge

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Cited by 22 publications
(16 citation statements)
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“…The use of AsH 3 has a strong effect on the Ge growth [7][8][9]. In our growth processes we found that even a small addition of some sccm of AsH 3 in the gas phase along with iBuGe is able to reduce the growth rate up to 10 times.…”
Section: Resultsmentioning
confidence: 64%
“…The use of AsH 3 has a strong effect on the Ge growth [7][8][9]. In our growth processes we found that even a small addition of some sccm of AsH 3 in the gas phase along with iBuGe is able to reduce the growth rate up to 10 times.…”
Section: Resultsmentioning
confidence: 64%
“…It is possible that there are {1 1 1} facetted dips of the Ga and/or As diffusion into the Ge substrate during growth. These phenomena are governed by temperature [13][14][15].…”
Section: One-step Growthmentioning
confidence: 99%
“…To improve the crystal quality of the GaAs buffer layer, a two-step growth is a key process, where the GaAs buffer layer is grown at a low temperature and then continued with a high temperature. At a low growth temperature of 475-530 1C, a GaAs nucleation layer acts as a diffusion barrier to prevent Ge outdiffusion from the Ge substrate surface during the high temperature growth at 600-700 1C [9,[13][14][15][16]. As a result, to propose the GaAs layer to be a part of buffer layer for the InGaAsN solar-cell structure on Ge substrate, further optimization of the GaAs growth conditions is needed.…”
Section: Introductionmentioning
confidence: 99%
“…The high quality GaAs films grown on Ge substrates are crucial important for the performances of these devices. Even though the mismatches of lattice constants and thermal expansion coefficients between GaAs and Ge are negligible, challenges remain in growing GaAs directly on Ge substrate [2], mainly due to the formation of anti-phase domains (APDs) when polar materials GaAs grown on nonpolar materials Ge [5,6], and the atomic interdiffusion near the GaAs/Ge interface [1,[7][8][9]. For the former, it has been well established that under proper growth conditions, the APDs can be eliminated by the adoption of off-cut Ge substrates [10][11][12][13][14][15].…”
Section: Introductionmentioning
confidence: 99%