2012
DOI: 10.1016/j.micromeso.2012.05.042
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Effect of surfactants on the porogen size in the low-k methylsilsesquioxane/polystyrene hybrid films

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Cited by 6 publications
(3 citation statements)
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“…It is well known that zeta potential measurements might provide some additional insights into the magnitude of the repulsion or attraction between particles. 51 Therefore, the successful coating of chitosan was confirmed by the zeta potential analysis of the resulting composite. The zeta potential results are shown in Fig.…”
Section: Resultsmentioning
confidence: 89%
“…It is well known that zeta potential measurements might provide some additional insights into the magnitude of the repulsion or attraction between particles. 51 Therefore, the successful coating of chitosan was confirmed by the zeta potential analysis of the resulting composite. The zeta potential results are shown in Fig.…”
Section: Resultsmentioning
confidence: 89%
“…Silk Sugar (British Sugar Industrial, UK) was used to create pores around 5 um and filtered NaHCO3 was used to create pores around 40 um (Chen et al , 2012). A mixed solution of porogens of both Silk Sugar and NaHCO 3 (ratio of 1:1) was produced to try to create interconnectivity between pores.…”
Section: 1mentioning
confidence: 99%
“…At present, the lower dielectric constant of a film can be obtained by producing pores or reducing the polarity of the chemical bonds. Many studies focused on the characteristics of low dielectric constant materials [3][4][5][6][7][8][9][10][11][12]. Different kinds of low dielectric constant materials, such as methylsilsesquioxane (MSQ), HSQ, SiCOH, a porous silica, silica-carbon and fluorinatedcarbon, have been investigated in recent years.…”
Section: Introductionmentioning
confidence: 99%