Effect of substrate thickness on quasi-longitudinal leaky SAW propagation on quartz

Oshio, Masahiro; Kanna, S.; Iizawa, Keigo

doi:10.1109/ultsym.2005.1603239

Cited by 2 publications

(2 citation statements)

References 14 publications

(12 reference statements)

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“…The leaky-SAW resonance frequency is determined by the IDT-grating period and the longitudinal bulk acoustic velocity of the elastic medium. For a given IDT period, this resonance frequency is usually higher than the SAW resonance frequency (as the longitudinal bulk velocity > SAW velocity). ,− …”

Section: Acoustic Wave Generationmentioning

confidence: 99%

Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves

et al. 2022

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Tailoring the interaction between light and sound has opened new possibilities in photonic integrated circuits (PICs) that range from achieving quantum control of light to high-speed information processing. However, the actuation of sound waves in Si PICs usually requires integration of a piezoelectric thin film. Lead zirconate titanate (PZT) is a promising material due to its strong piezoelectric and electromechanical coupling coefficient. Unfortunately, the traditional methods to grow PZT on silicon are detrimental for photonic applications due to the presence of an optical lossy intermediate layer. In this work, we report integration of a high quality PZT thin film on a silicon-on-insulator (SOI) photonic chip using an optically transparent buffer layer. We demonstrate acousto-optic modulation in silicon waveguides with the PZT actuated acoustic waves. We fabricate interdigital transducers (IDTs) on the PZT film with a contact photolithography and electron-beam lithography to generate the acoustic waves in MHz and GHz ranges, respectively. We obtain a V π L ∼ 3.35 V•cm at 576 MHz from a 350 nm thick gold (Au) IDT with 20 finger-pairs. After taking the effect of mass-loading and grating reflection into account, we measured a V π L ∼ 3.60 V•cm at 2 GHz from a 100 nm thick aluminum (Al) IDT consisting of only four finger-pairs. Thus, without patterning the PZT film nor suspending the device, we obtained figures-of-merit comparable to state-of-the-art modulators based on SOI, making it a promising candidate for a broadband and efficient acousto-optic modulator for future integration.

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Section: Acoustic Wave Generationmentioning

confidence: 99%

Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves

et al. 2022

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“…The propagation properties of LLSAWs on the rotated Ycut Qz have been reported. [28][29][30] For instance, AT-cut 0°Xpropagating Qz [Euler angle: (0°,-54.7°,0°)] exhibits a high phase velocity of 5745 m s −1 and a small attenuation of less than 10 -2 dB/λ; however, its K 2 is 0.023%. 28) In general, wave energy is concentrated in the region with a slower phase velocity.…”

Section: Theoretical Calculation Of Propagation Propertiesmentioning

confidence: 99%

Analysis of longitudinal leaky surface acoustic waves on quartz thin plate bonded to similar-material substrate

Fujii

Fujimaki

Suzuki

et al. 2022

Jpn. J. Appl. Phys.

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The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAWs) on bonded structures consisting of a quartz (Qz) thin plate and a Qz support substrate with different Euler angles were investigated theoretically. By using both an X-cut Qz thin plate and a Qz support substrate with optimal Euler angles, we obtained LLSAWs with a larger coupling factor, a smaller attenuation, and a lower temperature coefficient of frequency than those on a single Qz substrate. Furthermore, from the resonance properties simulated by the finite element method, the bonded structures were found to exhibit a large admittance ratio and a high quality factor, which could not be obtained when using a single Qz substrate; the bandwidth however was as small as 0.016-0.086%.

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Effect of substrate thickness on quasi-longitudinal leaky SAW propagation on quartz

Cited by 2 publications

References 14 publications

Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves

Light Modulation in Silicon Photonics by PZT Actuated Acoustic Waves

Analysis of longitudinal leaky surface acoustic waves on quartz thin plate bonded to similar-material substrate

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