To obtain a bonded structure with low attenuation for leaky surface acoustic waves (LSAWs), the propagation and resonance properties of LSAWs on a similar-material thin plate bonded to a LiTaO3 (LT) or LiNbO3 (LN) support substrate were theoretically analyzed. It was found that zero attenuation can be simultaneously obtained for free and metallized surfaces by utilizing the similar-material bonded structure but not when using a single structure. For a 10°YX-LN/66°YX-LN structure, the antiresonance Qa and the admittance ratio of the bonded structure were 1570 and 99 dB, respectively, even taking into consideration a mechanical loss of 1/Qm = 10−3, and were higher than those of a single LN structure. For a YX-LT/36°YX-LT structure, we observed the same or less attenuation and an approximately 1.3 times higher coupling factor than those for a single 36°YX-LT structure. The LT similar-material bonded structure had slightly superior resonance properties to the single structure.
The propagation and resonance properties of longitudinal leaky surface acoustic waves (LLSAWs) on bonded structures consisting of a quartz (Qz) thin plate and a Qz support substrate with different Euler angles were investigated theoretically. By using both an X-cut Qz thin plate and a Qz support substrate with optimal Euler angles, we obtained LLSAWs with a larger coupling factor, a smaller attenuation, and a lower temperature coefficient of frequency than those on a single Qz substrate. Furthermore, from the resonance properties simulated by the finite element method, the bonded structures were found to exhibit a large admittance ratio and a high quality factor, which could not be obtained when using a single Qz substrate; the bandwidth however was as small as 0.016-0.086%.
The propagation and resonance properties of a leaky surface acoustic wave (LSAW) on quartz thin plates bonded to a similar-material substrate are investigated theoretically. The electromechanical coupling factor K
2 on Z-cut quartz (Z–Q) thin plates bonded to an AT-cut 0°X-propagating quartz (AT0°X-Q) support substrate is calculated to be 0.43%, which is approximately three times larger than the maximum value of a single quartz substrate. A positive temperature coefficient of frequency for LSAW can be produced on a quartz thin plate bonded to a quartz substrate with a different cut angle. By the finite element method, the aluminum thin-film thickness dependence of the resonance properties of LSAW on LST-cut quartz (LST-Q) and LST-Q/AT0°X-Q is analyzed. In the simulation with the optimal Al thin-film thickness, the admittance ratio on the LST-Q/AT0°X-Q is found to be larger than that for the single LST-Q.
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