Effect of Stoichiometric Disturbances in A B Compounds during Ion Implantation

Maksimov, S. K.; Egorov, V. L.; Kryuk, V. V.; Piskunov, D. I.; Pitirimova, E. A.; Veselov, V. F.

doi:10.1515/9783112500705-072

October 16 1982

DOI: 10.1515/9783112500705-072

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Effect of Stoichiometric Disturbances in A B Compounds during Ion Implantation

S. K. Maksimov¹,

V. L. Egorov²,

V. V. Kryuk³

et al.

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Effect of Stoichiometric Disturbances in A B Compounds during Ion Implantation

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