2006
DOI: 10.1063/1.2176859
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Effect of SiO2 incorporation on stability and work function of conducting MoO2

Abstract: We show the incorporation of different amounts of SiO2 in conducting MoO2 results in materials that have large vacuum work functions tunable by approximately 1eV and improved thermal stability at elevated temperatures. Electrical measurements of MoSixOy∕HfO2∕SiOx∕n-Si capacitors show an approximate 5.1eV work function, suitable for p-channel metal-oxide-semiconductor devices. . Thickening of the interfacial SiOx layer was observed, however, after annealing the stack at higher temperatures in N2.

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Cited by 24 publications
(21 citation statements)
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“…Therefore, the existence of Al, Ce(III,IV) oxides and hydroxides and Mo oxides apparently influences the electronic properties of the protecting oxide film. A similar case has been reported by Liang et al 56 Accordingly, a mixed oxide system containing MoO 2 and SiO 2 oxides has been prepared by coevaporation in order to tune electronic properties of MoO 2 oxide. The addition of SiO 2 has resulted in gradual decrease of the work function of a mixed system from 6.5 eV to about 5.5 eV where maximal content of SiO 2 was 33%.…”
Section: ■ Discussionsupporting
confidence: 57%
“…Therefore, the existence of Al, Ce(III,IV) oxides and hydroxides and Mo oxides apparently influences the electronic properties of the protecting oxide film. A similar case has been reported by Liang et al 56 Accordingly, a mixed oxide system containing MoO 2 and SiO 2 oxides has been prepared by coevaporation in order to tune electronic properties of MoO 2 oxide. The addition of SiO 2 has resulted in gradual decrease of the work function of a mixed system from 6.5 eV to about 5.5 eV where maximal content of SiO 2 was 33%.…”
Section: ■ Discussionsupporting
confidence: 57%
“…From the equation above, the work‐functions were estimated to be ≈5.3, 5.7, and 5.6 eV, respectively, for monolayer MoS 2 , MoS 2 –MoO 2 heterostructure on SiO 2 /Si, and MoS 2 –MoO 2 heterostructure on fused silica. In addition, the work‐function of metallic MoO 2 was known to be ≈6.5 eV, much higher than that of MoS 2 . Based on this analysis, we can deduce that for the MoS 2 –MoO 2 heterostructure on SiO 2 /Si, which has a larger work‐function, its metallic behavior is attributed to a lower coverage of MoS 2 (or insufficient sulfurization) on MoO 2 , while sufficient sulfurization in the MoS 2 –MoO 2 heterostructure on fused silica with a lower work‐function enables its semiconducting behavior.…”
mentioning
confidence: 99%
“…For example, the metal-oxygen bond of MoO 2 is primarily "ionic" while that of SiO 2 is "covalent." Consequently, the lattice oxygen mobility of MoO 2 decreases by doping it with a small amount of SiO 2 [106]. The metallic property of MO 2 actively breaks various chemical bonds in bio-fuels leading to their high oxidation activity, while their ability to selectively transfer lattice oxygen to the carbon fragments minimizes coke formation during fuel oxidation [90,[107][108][109][110][111].…”
Section: Alternative Mo 2 Catalytic Materials In Direct Sofcsmentioning
confidence: 99%