Abstract:The effect of a sensing film's thickness on the drift phenomenon of capacitive-type humidity sensors in a hot and humid atmosphere was investigated. Poly͑methyl methacrylate͒ ͑PMMA͒ was chosen as the model sensing material for this purpose. The electrical capacitance measured at 0% relative humidity ͑RH, C 0 ) decreased, while that measured in a wet atmosphere (C X ) increased by aging the sensors in a 40°C and 90% RH atmosphere. This aging test showed an increase in the resulting sensitivity (C X /C 0 ). The … Show more
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