Effect of self-ion with high-energy irradiation on the surface morphology, microstructure and mechanical properties of nanocrystalline TiAlN coating

Zhang, Z.Q.; Zhang, L.; Yan, Weiqing; Zhang, Y.F.; Yuan, Hong; Shen, Yanzhen; Liao, B.; Zhang, X.; Zhang, Fazhuo; Ouyang, Xiaoping

doi:10.1016/j.matchar.2022.112041

Cited by 8 publications

(5 citation statements)

References 43 publications

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“…Increasing the duty cycle from 3% to 18% led to a decrease in the rate of deposition from 22.11 to 14.56 nm/min (see Figures 4e-h and 5b) due to an increase in the number of inert gaseous ions attracted to the substrate. The mechanical properties of a coating are closely related to the compactness of the structure and the size of the columnar crystals [6,40]. Figure 7 presents cross-sectional TEM images and the corresponding deposition rates under DC, TD0, and TD50 with a duty cycle of 3% or 12%.…”

Section: Resultsmentioning

confidence: 99%

“…The mechanical properties of a coating are closely related to the compactness of the structure and the size of the columnar crystals [6,40]. Figure 7 presents cross-sectional TEM images and the corresponding deposition rates under DC, TD0, and TD50 with a duty cycle of 3% or 12%.…”

Section: Resultsmentioning

confidence: 99%

“…The dominant mechanisms determining surface energy and strain energy are film thickness and the energy of ion bombardment. Note that we are unable to discuss the differences in XRD intensities of various crystal planes due to a lack of fixed parameters.The mechanical properties of a coating are closely related to the compactness of the structure and the size of the columnar crystals[6,40]. Figure7presents cross-sectional TEM images and the corresponding deposition rates under DC, TD0, and TD50 with a duty cycle of 3% or 12%.…”

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confidence: 99%

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Effects of Synchronous Bias Mode and Duty Cycle on Microstructure and Mechanical Properties of AlTiN Coatings Deposited via HiPIMS

Tang,

Huang,

Chen

et al. 2023

Coatings

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The good mechanical properties of metal nitrides make them ideal surface coatings for cutting tools and mold components. Conventional TiN coatings have largely been replaced by AlTiN due to their superior mechanical properties and resistance to high temperatures. In this study, we investigated the application of bias voltage to the substrate to enhance ion bombardment during the synthesis of protective AlTiN coatings using high-power impulse magnetron sputtering (HiPIMS) with synchronous trigger-direct current (ST-DC) bias voltage. The ST-DC parameters included the duty cycle duration (3%, 6%, 12%, 18%) and turn-on time, which included synchronous (TD0) or a trigger delay of 50 μs (TD50). Scanning electron microscope images revealed that the highest deposition rate (22.1 nm/min) was achieved using TD50 with a duty cycle of 3%. The results obtained using an electron probe microanalyzer and X-ray diffractometer revealed the formation of an h-AlN structure when the Al/Ti ratio was between 0.71 and 0.74. Transmission electron microscopy and nanoindentation results revealed that transforming DC bias into synchronous bias to boost the bias output time (i.e., increasing the duty cycle) increased AlTiN grain refinement (from ~100 nm to ~55 nm) with a corresponding increase in hardness (from 22.7 GPa to 24.7 GPa) as well as an increase in residual stress within the AlTiN coating (from 0.16 GPa to −51 GPa). The excellent adhesion performance of the coatings provided further evidence indicating the importance of duty cycle and trigger delay when using pulsed-DC bias in HiPIMS.

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Section: Resultsmentioning

confidence: 99%

Section: Resultsmentioning

confidence: 99%

mentioning

confidence: 99%

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Effects of Synchronous Bias Mode and Duty Cycle on Microstructure and Mechanical Properties of AlTiN Coatings Deposited via HiPIMS

Tang,

Huang,

Chen

et al. 2023

Coatings

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“…The deconvolution shows that the Ti2p 3/2 spectrum consists of peaks with core levels at 455.5 eV, 457.5 eV, and 459.6 eV. The 455.5 eV peak corresponds to the bonds in TiAlN [57], while that at 457.5 eV is associated with TiO X N Y [58]. The least intensive peak, with BE 459.6 eV, can be attributed to TiO 2 .…”

Section: Composition and Structurementioning

confidence: 96%

“…The most intensive peak corresponding to the binding energy of 74.5 eV was recognized as an Al-N bond in AlN [58]. The peak positioned at a lower BE of 73.6 eV is assigned to TiAlN or non-stoichiometric AlN x [57]. Because the presence of TiAlN was identified by the Ti2p spectrum, it could be assumed that this peak of the Al2p spectrum corresponds to the TiAlN solid solution.…”

Section: Composition and Structurementioning

confidence: 99%

The Role of Period Modulation on the Structure, Composition and Mechanical Properties of Nanocomposite Multilayer TiAlSiN/AlSiN Coatings

Kolchev,

Kolaklieva,

Chitanov

et al. 2023

Coatings

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This paper presents the results of the investigation of a multilayer TiAlSiN/AlSiN coating. A novel coating architecture with a period consisting of nanocomposite sublayers of TiAlSiN and AlSiN was developed. We discovered that the combination of a harder sublayer with a more elastic one allows for obtaining a suitable combination of superhardness and enhanced toughness. The coating was deposited by cathodic arc technology. The EDS, XRD, and XRS analyses revealed that the nanocomposite structure is composed of TiAlSiN and AlSiN nanocrystallites, with sizes of 12–13 nm and 4–5 nm, respectively. The nanograin phase is incorporated in an amorphous Si3N4 matrix. The achieved structure causes the presence of four factors contributing to the hardness increase: nanocomposition, solid solution, refinement hardening, and the formation of many interfaces. An instrumented indentation test was used to investigate the mechanical properties. The developed coating possesses a superhardness of 49.5 GPa and a low elastic modulus of 430 GPa, resulting in an improved elastic strain resistance of 0.11, a plastic deformation resistance of 0.58 GPa, and an elastic recovery of 68%. These results imply that the developed coating combines high stability with mechanical degradation under external influence and provides an improved ability to absorb energy at deformation before fracture, and high elastic recovery. The investigation of the effect of the period modulation on the structure, composition, and mechanical properties of the nanocomposite multilayer TiAlSiN/AlSiN coating showed that the superhardness was due to the nanocomposite and solid solution hardening rather than the increased number of interfaces. The demonstrated combination of superhardness with high elasticity and improved toughness determines the developed nanocomposite TiAlSiN/AlSiN coating as very suitable for industrial applications such as high speed and dry machining.

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The microstructure and physical properties of AlN and SiC ceramics after irradiation with 2 MeV Au ions

Yang

Wang

Zhang

et al. 2023

Applied Surface Science

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Effect of self-ion with high-energy irradiation on the surface morphology, microstructure and mechanical properties of nanocrystalline TiAlN coating

Cited by 8 publications

References 43 publications

Effects of Synchronous Bias Mode and Duty Cycle on Microstructure and Mechanical Properties of AlTiN Coatings Deposited via HiPIMS

Effects of Synchronous Bias Mode and Duty Cycle on Microstructure and Mechanical Properties of AlTiN Coatings Deposited via HiPIMS

The Role of Period Modulation on the Structure, Composition and Mechanical Properties of Nanocomposite Multilayer TiAlSiN/AlSiN Coatings

The microstructure and physical properties of AlN and SiC ceramics after irradiation with 2 MeV Au ions

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