Effect of rubidium incorporation on the optical properties and intermixing in Mo/Si multilayer mirrors for EUV lithography applications

Saedi, Mehdi; Sfiligoj, Cristina; Verhoeven, J.; Frenken, J.W.M.

doi:10.1016/j.apsusc.2019.144951

Cited by 8 publications

(3 citation statements)

References 27 publications

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“…Rubidium (Rb) is a kind of rare and precious metal with good plasticity and ductility, which can produce photoelectric effect and is widely used in many high-tech fields. [1][2][3] The traditional methods of extracting Rb usually have some disadvantages, such as complex process, poor selectivity, high consumption of organic solvent, and so on. [4][5][6] Therefore, the development of an environmentally friendly and rapid Rb adsorption material to quickly and efficiently complete the separation and purification of Rb + has important economic value and environmental significance.…”

Section: Introductionmentioning

confidence: 99%

Preparation of MOR/P(S‐co‐VPh) nanofiber composite membrane and its adsorption properties for rubidium ions

Fei,

Shi,

Wang

et al. 2024

J of Applied Polymer Sci

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Rubidium (Rb), a rare and precious metal, is widely used in high‐tech fields. In this work the structural advantages of mordenite (MOR) and group affinity of phenolic hydroxyl polymers (poly (styrene‐4‐hydroxystyrene) (P(S‐co‐VPh)) are combined to prepare MOR/P(S‐co‐VPh) nanofiber composite membranes with high selectivity and adsorption specificity for Rb+ by electrospinning. The test results show that MOR is successfully anchored on the nanofiber substrate and maintained its complete crystal structure. Adsorption experiments show that the adsorption capacity of Rb+ increases with the increase of MOR content, and pH = 9.0, T = 25°C are the best adsorption conditions. K+ shows the most obvious interference with the adsorption capacity decreased from 60.03 to 39.33 mg/g. The adsorption process follows with the Langmuir isothermal model and pseudo‐second‐order kinetic equation. The chemical adsorption based on the coordination reaction is the control step, and the intraparticle diffusion also has an important effect on the adsorption rate. The recycling test indicates that the prepared nanofiber composite membrane not only has efficient adsorption of Rb+, but also exhibits excellent regeneration and stability, which helps to achieve its widespread application and long‐term operation in harsh environments.

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Section: Introductionmentioning

confidence: 99%

Preparation of MOR/P(S‐co‐VPh) nanofiber composite membrane and its adsorption properties for rubidium ions

Fei,

Shi,

Wang

et al. 2024

J of Applied Polymer Sci

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“…Recently, Mo/Rb 12 Si 17 provided the highest theoretical value of reflectivity, while Mo/RbSi multilayer mirrors were found to be most thermodynamically stable. 4 These mirrors are appropriate for numerous applications, including the detection of emission lines of iron ions Fe(XX), Fe(XXI), and Fe(XXIII), 2 and its application in the EUV lithography. 5 The reflection coefficient of this mirror was improved up to a record value of 72%, while using the barrier Si layer in the combination of Mo/Be/Si structures.…”

Section: Introductionmentioning

confidence: 99%

“…It occurs due to the exceptional combination of optical constant, − compared to conventional Mo/Si multilayers. Recently, Mo/Rb 12 Si 17 provided the highest theoretical value of reflectivity, while Mo/RbSi multilayer mirrors were found to be most thermodynamically stable . These mirrors are appropriate for numerous applications, including the detection of emission lines of iron ions Fe(XX), Fe(XXI), and Fe(XXIII), and its application in the EUV lithography .…”

Section: Introductionmentioning

confidence: 99%

Microstructural Transformation of Nanoscale Be Layers in the Mo/Be and Be/Mo Periodic Multilayer Mirrors Investigated by Raman Spectroscopy

et al. 2021

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Raman scattering studies were carried out for the investigation of bonding and microstructural properties of dimensionally confined nanoscale Be layers in the periodic Mo/Be and Be/Mo multilayer structures. The amorphous phase of alternate periodic Be nanolayers was partially transformed into the crystalline phase at the critical thickness of 2.44 nm. Crystallinity was further improved with the increase in the thickness of the periodic Be layers, which was associated with the decline of the surface-to-volume ratio of Be–Be bonding. However, upon thermal annealing, the bond-order defects in the crystalline Be phase gradually increased due to thermal stretching of Be–Be bonding. Beyond the critical annealing temperature of 573 K, a complete transformation of crystalline to ultrashort-ranged amorphous Be phase was observed in the multilayer structures. At critical thicknesses, the transformation of amorphous Mo and Be nanolayers into the polycrystalline structure was confirmed by the combination of X-ray diffraction and Raman scattering studies, respectively.

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Size-dependent plasmon effects in periodic W-Si- based mirrors, investigated by X-ray photoelectron spectroscopy

Kozakov

Kumar

Гарахин

et al. 2021

Applied Surface Science

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Effect of rubidium incorporation on the optical properties and intermixing in Mo/Si multilayer mirrors for EUV lithography applications

Cited by 8 publications

References 27 publications

Preparation of MOR/P(S‐co‐VPh) nanofiber composite membrane and its adsorption properties for rubidium ions

Preparation of MOR/P(S‐co‐VPh) nanofiber composite membrane and its adsorption properties for rubidium ions

Microstructural Transformation of Nanoscale Be Layers in the Mo/Be and Be/Mo Periodic Multilayer Mirrors Investigated by Raman Spectroscopy

Size-dependent plasmon effects in periodic W-Si- based mirrors, investigated by X-ray photoelectron spectroscopy

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