Effect of Process Variation on Field Emission Characteristics in Surface-Conduction Electron Emitters

Lo, Hsiang-Yu; Li, Yiming; Tsai, Chia-Hung Dylan; Chao, Hsueh-Yung; Pan, Fu‐Ming

doi:10.1109/tnano.2008.926347

Cited by 10 publications

(1 citation statement)

References 12 publications

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“…As a kind of electron emission source based on field emissions, it has various potential applications, such as field emission displays (FEDs) [2][3][4][5], field emission lamps [6][7][8], small x-ray sources [9,10], and electric power switching devices [11,12]. It has been reported that several techniques can be used to create nanoscale fissures on conductive film, such as the focused ion beam (FIB) technique [13], palladium hydrogenation [14], the thermal shock process [15], and the electroforming process [16][17][18]. Among these techniques, the electroforming process is the simplest and most practical method, and has been adopted by Canon Inc. During the electroforming process, nanoscale fissures form due to a joule heat concentration caused by an electric current flowing through conductive film.…”

Section: Introductionmentioning

confidence: 99%

Analysis of the influence of nanofissure morphology on the performance of surface-conduction electron emitters

Shen

Wang

et al. 2016

J. Micromech. Microeng.

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A simulation model was built to numerically investigate the electron emission property of a new surface-conduction electron emitter (SCE) with a raised emitter structure. The model calculated the electric field distribution, the electron emission characteristics, and the electron trajectories, which were useful for analyzing and understanding the microscopic mechanism of the electron emissions of the new SCE structure. It was found that the new structure increased the probability of electrons being collected by the anode which led to an increase of the anode current despite of the decrease of field emission current. This study benefits the advanced design of emitter structures in nanoscale technology for new types of electron sources.

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Section: Introductionmentioning

confidence: 99%

Analysis of the influence of nanofissure morphology on the performance of surface-conduction electron emitters

Shen

Wang

et al. 2016

J. Micromech. Microeng.

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Electron Emission Properties of Surface-Conduction Electron Emitters With a PdO-C-PdO Multilayer Conductive Film Deposited by Magnetron Sputtering

Sun

2011

Journal of Elec Materi

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Conductive films are an essential component in surface-conduction electron emitters (SCEs), and they have a major influence on the electron emission properties of SCEs. In this work, a novel PdO-C-PdO multilayer film deposited by magnetron sputtering is proposed as the conductive film in SCEs. Three SCE cathodes with this type of multilayer film were fabricated, together with three other SCE cathodes with a PdO single-layer film used as a reference. For these cathodes, the dependences of the conduction current and the emission current on the device voltage and the anode voltage were measured, and the luminescence patterns were observed after the electroforming and activation processes of the conductive films had occurred. The surface morphologies of the conductive films were analyzed by scanning electron microscopy. The results indicate that the SCEs with the PdO-C-PdO multilayer conductive film have better electron emission properties compared with the SCEs with the PdO single-layer conductive film. For an anode voltage of 2 kV and a device voltage of 14 V, the emission current and the electron emission ratio of the SCEs with the PdO-C-PdO multilayer film can reach 179.5 lA and 2.2&, respectively.

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Optimization on configuration of surface conduction electron-emitters

Cheng

2010

Microelectronics Reliability

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Effect of Process Variation on Field Emission Characteristics in Surface-Conduction Electron Emitters

Cited by 10 publications

References 12 publications

Analysis of the influence of nanofissure morphology on the performance of surface-conduction electron emitters

Analysis of the influence of nanofissure morphology on the performance of surface-conduction electron emitters

Electron Emission Properties of Surface-Conduction Electron Emitters With a PdO-C-PdO Multilayer Conductive Film Deposited by Magnetron Sputtering

Optimization on configuration of surface conduction electron-emitters

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