1987
DOI: 10.1364/ao.26.001112
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Effect of piezoelectric transducer nonlinearity on phase shift interferometry

Abstract: If the nonlinearity of the motion of a piezoelectric transducer (PZT) can be described as a quadratic function, the integrated intensity of one frame in phase shift interferometry can be calculated using the Fresnel integral. For a PZT with smaller nonlinearity, the rms phase error is almost linearly proportional to the quadratic coefficient The effects of PZT nonlinearity on the three- and the four-bucket algorithms are compared.

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Cited by 126 publications
(43 citation statements)
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“…The mechanical hysteresis generated high spatial frequency noise, and the nonlinear movement in response to applied voltages resulted in periodic phase errors and reduced phase stability [32]. A closed-loop PZT with more linear and hysteresis-free movement is necessary to overcome phase aberrations caused by the mechanical motion.…”
Section: Discussionmentioning
confidence: 99%
“…The mechanical hysteresis generated high spatial frequency noise, and the nonlinear movement in response to applied voltages resulted in periodic phase errors and reduced phase stability [32]. A closed-loop PZT with more linear and hysteresis-free movement is necessary to overcome phase aberrations caused by the mechanical motion.…”
Section: Discussionmentioning
confidence: 99%
“…(1), find a way to recover the unknown phase x,y . On this topic we can find several works that deal with this problem, to mention some of them we can cite [2][3][4][5][6][7][8][9][10].…”
mentioning
confidence: 99%
“…The phase distribution ϕ(x) is extracted using a Fourier-like transformation method [17], expressed by Equation (2) as follows:…”
Section: High-resolution Sensing Methods Using Phase Detection With Momentioning
confidence: 99%