1996
DOI: 10.1063/1.361733
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Effect of nucleating layers on the soft magnetic properties of multilayer permalloy films

Abstract: The effects of different undercoats and silicon nitride nucleating layers on the coercive force, anisotropy field, and 5 to 100 MHz complex permeability spectra of magnetically soft, Ni81Fe19 multilayer thin films sputtered onto flexible, 52-μm-thick polyethylene terephthalate substrate for use as identification markers or electromagnetic interference shields is reported. In comparison to films deposited directly onto the substrate, nonmagnetic undercoat layers, including aluminum, copper, silicon, and silicon… Show more

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Cited by 5 publications
(3 citation statements)
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“…Si has been used as a seed layer for NiFe layers, 8,9 with good effects. Figure 3͑a͒ shows data from IrMn ''top'' spin valves grown on Si underlayers.…”
Section: Discussionmentioning
confidence: 99%
“…Si has been used as a seed layer for NiFe layers, 8,9 with good effects. Figure 3͑a͒ shows data from IrMn ''top'' spin valves grown on Si underlayers.…”
Section: Discussionmentioning
confidence: 99%
“…For an optimal tuning of the frequency resonance, several solutions have been discussed in the literature to decrease the anisotropy field with respect to a significant increase of the permeability. Existing solutions using an undercoat [1], a spacer layer in a multilayer Permalloy thin films [3], or a post-annealing after deposition [4] have been reported.…”
Section: Introductionmentioning
confidence: 99%
“…A 100 nm Si 3 N 4 undercoat separated the substrate and first permalloy layer. 7 The silicon nitride layers were deposited by reactive sputtering from a silicon target in a nitrogen-rich environment.…”
Section: Introductionmentioning
confidence: 99%