The soft magnetic properties of stripes fabricated using laser ablation of multilayer thin films

Grimes, Craig A.; Lumpp, Janet K.

doi:10.1063/1.362289

Cited by 7 publications

(2 citation statements)

References 8 publications

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“…In certain ranges of high frequencies, some magnetic materials suffer from a decrease in effective permeability [11][12][13]. In these cases, anisotropic magnetic materials (i.e., materials with a magnetically hard and easy axis in the plane of the film, formed, e.g., by application of a directional magnetic field during electrodeposition) are often employed, since the magnetic properties of the film are often more stable in the hard axis direction at higher frequencies [14][15][16][17]. For example, the easy axis (the in-plane direction of the plated film parallel to the applied magnetic field during plating) of an anisotropic magnetic film has a high permeability at low frequency and is therefore often used for low frequency applications, while the hard axis (the in-plane direction of the film perpendicular to the applied magnetic field) is often used for high frequency applications.…”

Section: Electroplated Soft Alloys With Magnetically Anisotropic Prop...mentioning

confidence: 99%

Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices

Park

Allen

1998

J. Micromech. Microeng.

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In this research, electroplated magnetically isotropic and anisotropic soft alloys and screen-printed soft ferrites applicable to micromachined micromagnetic devices are fabricated and characterized using in situ measurement techniques. Appropriate magnetic materials and deposition methods, such as electroplating and screen-printing techniques, are examined and material test structures are fabricated. Following material characterization, micromachined inductors with three-dimensional structure are fabricated to determine the usefulness of the magnetic materials and deposition methods. The micromachined inductor is a key component and geometry for realizing micromagnetic devices such as amplifiers, filters, sensors and actuators. Three different material types are studied in this work. Electroplated magnetically isotropic soft alloys, permalloy (Ni80Fe20), orthonol (Ni50Fe50) and amorphous cobalt-iron-copper (CoFeCu) alloys, are studied, followed by electroplated magnetically anisotropic soft alloys of permalloy (Ni80Fe20) and supermalloy (NiFeMo), which have magnetically easy and hard axes. Finally, screen-printed polymers filled with soft ferrite (NiZn and MnZn) powders are fabricated and characterized.

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Section: Electroplated Soft Alloys With Magnetically Anisotropic Prop...mentioning

confidence: 99%

Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices

Park

Allen

1998

J. Micromech. Microeng.

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“…To induce a preferential lifting direction of the microchips along a predetermined axis, the nickel layer was patterned into narrow stripes. Striping enforces the easy axis of magnetization along the striping direction 38,39 . This effect is stronger with stripes that have a high aspect ratio 40 .…”

Section: Magnetic Assemblymentioning

confidence: 99%

Vertical integration of microchips by magnetic assembly and edge wire bonding

et al. 2020

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The out-of-plane integration of microfabricated planar microchips into functional three-dimensional (3D) devices is a challenge in various emerging MEMS applications such as advanced biosensors and flow sensors. However, no conventional approach currently provides a versatile solution to vertically assemble sensitive or fragile microchips into a separate receiving substrate and to create electrical connections. In this study, we present a method to realize vertical magnetic-field-assisted assembly of discrete silicon microchips into a target receiving substrate and subsequent electrical contacting of the microchips by edge wire bonding, to create interconnections between the receiving substrate and the vertically oriented microchips. Vertical assembly is achieved by combining carefully designed microchip geometries for shape matching and striped patterns of the ferromagnetic material (nickel) on the backside of the microchips, enabling controlled vertical lifting directionality independently of the microchip's aspect ratio. To form electrical connections between the receiving substrate and a vertically assembled microchip, featuring standard metallic contact electrodes only on its frontside, an edge wire bonding process was developed to realize ball bonds on the top sidewall of the vertically placed microchip. The top sidewall features silicon trenches in correspondence to the frontside electrodes, which induce deformation of the free air balls and result in both mechanical ball bond fixation and around-the-edge metallic connections. The edge wire bonds are realized at room temperature and show minimal contact resistance (<0.2 Ω) and excellent mechanical robustness (>168 mN in pull tests). In our approach, the microchips and the receiving substrate are independently manufactured using standard silicon micromachining processes and materials, with a subsequent heterogeneous integration of the components. Thus, this integration technology potentially enables emerging MEMS applications that require 3D out-of-plane assembly of microchips.

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Micromagnetic simulation of the magnetic spectrum of ferromagnetic nanowire

Liu¹,

Wang²,

Liu³

et al. 2008

Journal of Applied Physics

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The dynamic susceptibilities of permalloylike nanowires (20×500×20nm3) have been investigated using the three-dimensional object oriented micromagnetic framework (OOMMF) code. The investigated systems show two resonant peaks associated with a “bulk” and an “edge” mode, which are attributed to the local effective field relevant to the local magnetic moments. A local analysis for ferromagnetic resonance calculation has been developed. It handles the local magnetic moments at the edge and the middle of the nanowire, respectively. The resonant frequencies of the edge mode are directly proportional to Ms or A under the same fundamental length scale, i.e., the exchange length.

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The soft magnetic properties of stripes fabricated using laser ablation of multilayer thin films

Abstract: Mn-Zn ferrite thin films fabricated on crystalline substrates using laser ablation technique

Cited by 7 publications

References 8 publications

Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices

Development of magnetic materials and processing techniques applicable to integrated micromagnetic devices

Vertical integration of microchips by magnetic assembly and edge wire bonding

Micromagnetic simulation of the magnetic spectrum of ferromagnetic nanowire

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