Effect of nitrogen content on microstructure and corrosion resistance of sputter-deposited multicomponent (TiNbZrTa)Nx films

Influence of Metal Substitution and Ion Energy on Microstructure Evolution of High-Entropy Nitride (TiZrTaMe)N1–x (Me = Hf, Nb, Mo, or Cr) Films

“…% for each). , HEAs have been gradually extended to high-entropy ceramics by replacing or adding non-metal elements, such as nitrogen, carbon, boron, and oxygen. High-entropy nitride (HEN) thin films are attracting interest as diffusion barrier layers, electrical contact material, hard wear-resistant coatings, as well as corrosion-resistant coatings to withstand harsh environments. , They offer more design possibilities than traditional binary and ternary nitrides and carbides. The majority of single-phase HEN films have so far been synthesized by cathodic arc deposition and sputtering techniques using a single compound target ,, or segmented , as well as mosaic targets in mixed argon/nitrogen atmospheres.…”

“…High-entropy nitride (HEN) thin films are attracting interest as diffusion barrier layers, electrical contact material, hard wear-resistant coatings, as well as corrosion-resistant coatings to withstand harsh environments. , They offer more design possibilities than traditional binary and ternary nitrides and carbides. The majority of single-phase HEN films have so far been synthesized by cathodic arc deposition and sputtering techniques using a single compound target ,, or segmented , as well as mosaic targets in mixed argon/nitrogen atmospheres. This includes material systems of HENs with metal components from (Ti, Zr, Hf, V, Nb, Ta, Mo and W) to late 3d-transition metals (Cr, Mn, Co, Fe, Cu, and Ni) plus the main-group elements Al and Si .…”

“…In earlier studies, we investigated (TiNbZrTa)N films using several single-element targets. , Here, we study the systematic replacement of Nb with three other metal targets: Hf, Mo, or Cr. These metals were chosen because they have different nitride formation abilities as well as different atomic size and mass.…”

High-temperature wear mechanisms of TiNbWN films: Role of nanocrystalline oxides formation

“…Recently, incorporation of p-block elements such as nitrogen (N), carbon (C), and boron (B) has led to the development of new high/medium entropy materials, which are high/medium entropy nitrides (HENs/MENs), high/medium entropy carbides (HECs/MECs), and high/medium entropy borides (HEBs/MEBs) [4][5][6][7]. The HENs/MENs possess superiorities in terms of high-temperature thermal stability, oxidation resistance, and mechanical properties due to the sluggish diffusion and solid solution strengthening effects, being qualified as protective films on the mechanical parts that operate at varying temperatures [5,[7][8][9].…”

Xe Ion Irradiation-Induced Structural Transitions and Elemental Diffusion in High-Entropy Alloy and Nitride Thin-Film Multilayers

“…Addition of a small amount of C and N in the HEAs can improve the irradiation resistance of the parent-HEAs by increasing lattice distortion and roughening atomic-level energy landscape [6,23]. High entropy nitrides (HENs) [24], a class of ceramic materials based on HEA concept, but with dissolved nitrogen, have been studied as protective coatings for cutting tools [25,26], diffusion barrier layers [27], and corrosion resistant coatings [28] are now finding application as irradiation resistant coatings [7,29]. Combining the good irradiation resistance of HEAs and HENs with merits such as mechanical and defect-annihilating-promotion properties of multilayered structures, the irradiation resistant behavior of the novel HEA/HEA and HEN/HEN multilayer films and the underlying mechanism are worthy of investigation.…”