Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil inductively coupled argon discharge

Jayapalan, Kanesh Kumar; Chin, O. H.

doi:10.1063/1.4872004

Cited by 6 publications

(3 citation statements)

References 26 publications

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“…This can be explained as follows: As argon pressure is increased, the number of particles in the chamber increases. The frequency of collisions between particles increase and energy exchange between particles becomes more efficient [9]. The argon neutrals receive more kinetic energy from the plasma particles resulting in the observed increase of T n .…”

Section: Statistical Analysis Of Measured and Convolved Spectramentioning

confidence: 99%

Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

Jayapalan

Chin

2015

AIP Conference Proceedings

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Measuring the temperature of neutrals in inductively coupled plasmas (ICP) is important as heating of neutral particles will influence plasma characteristics such as the spatial distributions of plasma density and electron temperature. Neutral gas temperatures were deduced using a non-invasive technique that combines gas actinometry, optical emission spectroscopy and simulation which is described here. Argon gas temperature in a 13.56 MHz ICP were found to fall within the range of 500-800 K for input power of 140-200 W and pressure of 0.05-0.2 mbar. Comparing spectrometers with 0.2 nm and 0.5 nm resolution, improved fitting sensitivity was observed for the 0.2 nm resolution.

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Section: Statistical Analysis Of Measured and Convolved Spectramentioning

confidence: 99%

Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

Jayapalan

Chin

2015

AIP Conference Proceedings

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“…At present, most efforts on the gas heating scheme were aimed at measuring the gas temperature [1][2][3] and analyzing the heating mechanism, [4][5][6] e.g., elastic and charge exchange collisions and Franck-Condon. In addition, the influence of the gas heating on the magnitudes of electron density and temperature, [7] the varying trend of electron temperature against power, [8] the wave magnetic fields and skin effect, [9] etc., are also specified. As analyzed, the neutral depletion [10][11][12][13] is actually caused cooperatively by the pressure balance and gas heating.…”

Section: Introductionmentioning

confidence: 99%

Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows

Zhao¹,

Feng²

2018

Chinese Phys. B

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In this work, incompressible and compressible flows of background gas are characterized in argon inductively coupled plasma by using a fluid model, and the respective influence of the two flows on the plasma properties is specified. In the incompressible flow, only the velocity variable is calculated, while in the compressible flow, both the velocity and density variables are calculated. The compressible flow is more realistic; nevertheless, a comparison of the two types of flow is convenient for people to investigate the respective role of velocity and density variables. The peripheral symmetric profile of metastable density near the chamber sidewall is broken in the incompressible flow. At the compressible flow, the electron density increases and the electron temperature decreases. Meanwhile, the metastable density peak shifts to the dielectric window from the discharge center, besides for the peripheral density profile distortion, similar to the incompressible flow. The velocity profile at incompressible flow is not altered when changing the inlet velocity, whereas clear peak shift of velocity profile from the inlet to the outlet at compressible flow is observed as increasing the gas flow rate. The shift of velocity peak is more obvious at low pressures for it is easy to compress the rarefied gas. The velocity profile variations at compressible flow show people the concrete residing processes of background molecule and plasma species in the chamber at different flow rates. Of more significance is it implied that in the usual linear method that people use to calculate the residence time, one important parameter in the gas flow dynamics, needs to be rectified. The spatial profile of pressure simulated exhibits obvious spatial gradient. This is helpful for experimentalists to understand their gas pressure measurements that are always taken at the chamber outlet. At the end, the work specification and limitations are listed.

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“…where, p is the atmospheric pressure in Pa, k B is the Boltzmann constant in J K -1 and T n is neutral gas temperature of the measured plasma in K. For certain NTP conditions, T n is typically assumed to be close to room temperature, i.e., ~ 300 K. In the present work, however, T n was calculated via simulation algorithm [16] to account for the effects of neutral gas heating on discharge parameters.…”

Section: B Modeling Of Electron Density N E and Electron Temperaturmentioning

confidence: 99%

Characterization of an Atmospheric Air Non-thermal Plasma Device in Relation to Ozone Production

Lim¹,

Jayapalan²,

Zulkifli³

et al. 2017

IJESD

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Abstract-An atmospheric air non-thermal plasma (NTP) device is characterized in relation to ozone production. The electron density, n e , electron temperature, T e and ozone concentration are measured for three dielectric barrier discharge (DBD) geometries, i.e., ten tubes of 10 mm outer diameter (OD), six tubes of 25 mm OD, and three tubes of 40 mm OD.n e and T e are deduced using optical emission spectroscopy via the line ratio method and the ozone concentrations are measured by using an ozone meter.n e and ozone concentrations were the highest for the three tube-40 mm configuration, showing a correlation between the number of charged particles and ozone production.

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Effect of neutral gas heating on the wave magnetic fields of a low pressure 13.56 MHz planar coil inductively coupled argon discharge

Cited by 6 publications

References 26 publications

Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

Measurement of neutral gas temperature in a 13.56 MHz inductively coupled plasma

Gas flow characteristics of argon inductively coupled plasma and advections of plasma species under incompressible and compressible flows

Characterization of an Atmospheric Air Non-thermal Plasma Device in Relation to Ozone Production

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