“…The error bars are drawn using the standard deviation that was calculated from the 10 indents. As we can see, the results agree well with the change regulations of other types of the multilayers [ 6 , 13 , 14 , 15 , 16 , 17 , 18 , 19 , 23 , 31 , 36 ]. For the ReB 2 /TaN multilayers, the hardness reaches a maximum value of 38.7 GPa at Λ = 10 nm and t ReB2 : t TaN = 1:1, and then decreases as Λ increases or t ReB2 : t TaN decreases further.…”