Microstructure and properties of the AlCrMoZrTi/(AlCrMoZrTi)N multilayer high-entropy nitride ceramics films deposited by reactive RF sputtering

Ren, Bo; Zhao, Runze; Zhang, Guopeng; Liu, Zhongxia; Cai, Bin; Jiang, Aiyun

doi:10.1016/j.ceramint.2022.02.245

Cited by 16 publications

(5 citation statements)

References 36 publications

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“…The wear micrographs also show that this coating has wear resistance due to its enhanced resistance to plastic deformation with almost 50% N content present in the coating. Similar enhancements in wear as well as corrosion resistance properties were observed for other HEA nitride coatings, such as (AlCrMoSiTi)Nx deposited using FVCA [119], TiZrNbTaFeN deposited using HiPIMS [120], (AlCrTiZrHf)N deposited using reactive magnetron sputtering [121], and AlCrMoZrTi/(AlCrMoZrTi)N multilayer coatings deposited using RF magnetron sputtering techniques [122]. Similar to other ceramic coatings, the residual stress plays a critical role in the mechanical and tribological properties of HEA nitride coatings, and many reports have demonstrated the optimization of strate bias to reduce the residual stress.…”

Section: High Entropy Alloy-based Nitride Coatingssupporting

confidence: 69%

State-of-the-Art Developments in Advanced Hard Ceramic Coatings Using PVD Techniques for High-Temperature Tribological Applications

2023

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Hard and wear-resistant coatings created utilizing physical vapor deposition (PVD) techniques are extensively used in extreme tribological applications. The friction and wear behavior of coatings vary significantly with temperature, indicating that advanced coating concepts are essential for prolonged load-bearing applications. Many coating concepts have recently been explored in this area, including multicomponent, multilayer, gradient coatings; high entropy alloy (HEA) nitride; and functionally modified coatings. In this review, we highlighted the most significant findings from ongoing research to comprehend crucial coating properties and design aspects. To obtain enhanced tribological properties, the microstructure, composition, residual stress, hardness, and HT oxidation resistance are tuned through doping or addition of appropriate materials at an optimized level into the primary coatings. Such improvements are achieved by optimizing PVD process parameters such as input power, partial pressure, reactive gas flow rates, substrate bias, and temperature. The incorporation of ideal amounts of Si, Cr, Mo, W, Ag, and Cu into ternary and quaternary coatings, as well as unique multilayer designs, considerably increases the tribological performance of the coatings. Recent discoveries show that not only mechanical hardness and fracture toughness govern wear resistance, but also that oxidation at HT plays a significant role in the lubrication or wear failure of coatings. The tribo-induced metal oxides and/or Magnéli phases concentrated in the tribolayer are the key governing factors of friction and wear behavior at high temperatures. This review includes detailed insights into the advancements in wear resistance as well as various failure mechanisms associated with temperature changes.

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Section: High Entropy Alloy-based Nitride Coatingssupporting

confidence: 69%

State-of-the-Art Developments in Advanced Hard Ceramic Coatings Using PVD Techniques for High-Temperature Tribological Applications

2023

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“…This increase is consistent with the results obtained from Figure 6, where the hardness of the coatings increased with an increase in δr. As mentioned above, wear tests can result in different results due to the tribosystem formed, which depends on factors such as loading, test environment, [133] material of the counterpart, [147] sliding velocity, sliding distance, substrate for the coatings, surface roughness, and ongoing triboreactions. The presence of lubricious phases on the surface of coatings, such as formed by DLC layers or [15,16,19,23,24,47,74,78,95,113,118,126,137,138,[151][152][153][154][155][156][157]161,162,170,[172][173][174].…”

Section: Mechanical Properties Of Hescsmentioning

confidence: 99%

“…In these coatings, which are usually formed by two types of alternating layers, even if one type of these layers has the high‐entropy characteristic, it will be classified in this category. Some examples of these coatings include (AlCrTiZrNb)N/WS 2 , [ 132 ] AlCrMoZrTi/(AlCrMoZrTi)N, [ 133 ] VAlTiCrCu/WC, [ 134 ] and CrFeCoNi/TiNbZrTa. [ 135 ] As can be seen from their notification, in these coatings, sometimes only one type of layer is high entropic or has a high‐entropy sublattice.…”

Section: Classification Of Hescsmentioning

confidence: 99%

Atomic Radius Mismatch: A Key Parameter for Design and Synthesis of High‐Entropy Physical Vapor Deposition Coatings—Review

Lotfi‐Khojasteh,

Elmkhah,

Nouri

et al. 2024

Adv Eng Mater

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High‐entropy metal sublattice coatings (HESCs) prepared by physical vapor deposition (PVD) have received attention due to their diverse range of properties and applications. One of the most critical requirements for their synthesis is the prediction and control of their wide‐spread properties, and several efforts have been undertaken using various thermodynamical parameters. The majority of these predictions concentrate on high‐entropy alloys (HEAs) while high‐entropy ceramics (HECs) received little attention. One of the most important parameters to control the structure and properties of HEAs is their atomic radius mismatch (δr), which we apply to crystalline, amorphous, and composite (amorphous matrix, crystalline matrix, and multilayer) HESCs. Based on the relationships between δr and structure, mixing enthalpy (ΔHmix), electronegativity difference (Δχ), ion bonding percentage (IBPHE), mechanical properties (including hardness, H, and Young’s modulus, E), and wear performance descriptors (H/E and H3/E2 ratios) we provide a δr‐based map to aid the design and selection of elements for HESCs.This article is protected by copyright. All rights reserved.

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“…With the introduction of nitrogen, a set of diffraction peaks of FCC appeared in the film, indicating a structural transformation of the film and the generation of a new FCC structure. A large number of studies [21][22][23] have reported that the introduction of N atoms into refractory high-entropy alloy will form the FCC structure ceramic phase. With the F N increasing from 4 sccm to 8 and 12 sccm, the FCC (2 0 0) peak dramatically increases and dominates.…”

Section: Microstructure Of the (Tinbzrcr)n X Henfsmentioning

confidence: 99%

Plasma Bombardment-Induced Amorphization of (TiNbZrCr)Nx High-Entropy Alloy Nitride Films

Li,

Ma,

Liang

et al. 2024

Coatings

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The (TiNbZrCr)Nx high-entropy nitride films (HENFs) were prepared by high-power pulsed magnetron sputtering (HPPMS). The effect of the N2 flow rate (FN) on the HPPMS plasma discharge, film composition, microstructure, residual stress, tribological properties, and corrosion resistance was investigated. Results show that, with the increase in FN, plasma discharge is enhanced. Firstly, the introduced N atoms react with Ti, Nb, Cr, and Zr to form an FCC nitride phase structure. Then, with the increase in plasma bombardment on the deposited film, the HENFs undergo amorphization to form an FCC+ amorphous structure, accompanied by a decrease in grain size and a change in the preferred orientation from (1 1 1) to (2 0 0). The HENFs deposited at FN = 8 sccm show the highest hardness of 27.8 GPa. The HENFs deposited at FN = 12 sccm present the best tribological properties, with a low wear rate of 4.0 × 10−6 mm3N−1m−1. The corrosion resistance of the (TiNbZrCr)Nx HENFs shows a strong correlation with the amorphous phase. The corrosion resistance of the FCC nitride film is the worst, and the corrosion resistance gradually increases with the amorphous transformation of the film. Based on the above results, nanocomposite high-entropy films can be prepared using HPPMS technology and exhibit excellent, comprehensive performance.

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Microstructure and properties of the AlCrMoZrTi/(AlCrMoZrTi)N multilayer high-entropy nitride ceramics films deposited by reactive RF sputtering

Cited by 16 publications

References 36 publications

State-of-the-Art Developments in Advanced Hard Ceramic Coatings Using PVD Techniques for High-Temperature Tribological Applications

State-of-the-Art Developments in Advanced Hard Ceramic Coatings Using PVD Techniques for High-Temperature Tribological Applications

Atomic Radius Mismatch: A Key Parameter for Design and Synthesis of High‐Entropy Physical Vapor Deposition Coatings—Review

Plasma Bombardment-Induced Amorphization of (TiNbZrCr)Nx High-Entropy Alloy Nitride Films

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